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This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an actual position and end station of liquid suspended targeted particles by DEP force actuator manipulation.

The capability of both, sensing and manipulation was analysed based on capacitance changes corresponding to the particle positioning and stationing of the targeted particles at regions of interest. The mechanisms of DEP sensor and actuator, designed in DOC applications were energized by electric field of tapered DEP microelectrodes. The actual DEP forces behaviour has been also studied via quantitative analysis of capacitance measurement value and its correlation with qualitative analysis of positioning and stationing of targeted particles.

The significance of the present work is the ability of using tapered DEP microelectrodes in a closed mode system to simultaneously sense and vary the magnitude of manipulation.

The integration of DOC platform for contactless electrical-driven with selective detection and rapid manipulation can provide better efficiency in in situ selective biosensors or bio-detection and rapid bio-manipulation for DOC diagnostic and prognostic devices.

This paper aims to present the dielectrophoresis (DEP) force (FDEP), defined as microelectrofluidics mechanism capabilities in performing selective detection and rapid manipulation of blood components such as red blood cells (RBC) and platelets. The purpose of this investigation is to understand FDEP correlation to the variation of dynamic dielectric properties of cells under an applied voltage bias.

In this paper, tapered design DEP microelectrodes are used and explained. To perform the characterization and optimization by analysing the DEP polarization factor, the change in dynamic dielectric properties of blood components are observed according to the crossover frequency (f_xo) and adjustment frequency (f_adj) variation for selective detection and rapid manipulation.

Experimental observation of dynamic dielectric properties change shows clear correlation to DEP polarization factor when performing selective detection and rapid manipulation. These tapered DEP microelectrodes demonstrate an in situ DEP patterning efficiency more than 95%.

The capabilities of tapered DEP microelectrode devices are introduced in this paper. However, they are not yet mature in medical research studies for various purposes such as identifying cells and bio-molecules for detection, isolation and manipulation application. This is because of biological property variations that require further DEP characterization and optimization.

The introduction of microelectrofluidics using DEP microelectrodes operate by selective detecting and rapid manipulating via lateral and vertical forces. This can be implemented on precision health-care development for lab-on-a-chip application in microfluidic diagnostic and prognostic devices.

This study introduces a new concept to understand the dynamic dielectric properties change. This is useful for rapid, label free and precise methods to conduct selective detection and rapid manipulation of mixtures of RBC and platelets. Further, potential applications that can be considered are for protein, toxin, cancer cell and bacteria detections and manipulation. Implementation of tapered DEP microelectrodes can be used based on the understanding of dynamic dielectric properties of polarization factor analysis.

The quality of GeOx–Ge interface and the equivalent oxide thickness (EOT) are the main issues in fabricating high-k/Ge gate stack due to the low-k of GeOx interfacial layer (IL). Therefore, a precise study of the formation of GeOx IL and its contribution to EOT is of utmost importance. In this study, the GeOx ILs were formed through post-oxidation annealing of sputtered Al₂O₃ on the Ge substrate. The purpose of this paper is to report on growth kinetics and composition of IL between Al₂O₃ and Ge for HCl- and HF-last Ge surface.

After wet chemical cleaning with HCl or HF, Al₂O₃ was grown onto the Ge surface by RF sputtering. Thickness and composition of IL formed after post-anneal deposition at 400°C in dry oxygen ambience were evaluated as a function of deposition time by FESEM and characterized by X-ray photoelectron spectroscopy, respectively.

It was observed that the composition and thickness of IL were dependent on the starting surface and an aluminum germinate-like composition was formed during RF sputtering for both HF- and HCl-last starting surface.

The novelty of this work is to investigate the starting surface of Ge to IL growth between Al₂O₃/Ge that will lead to the improvement in Ge metal insulator field effect transistors (MISFETs) application.

The purpose of this paper is to discuss the fabrication technology and test of thermo-pneumatic actuator utilizing Si₃N₄-polyimide thin film membrane. Thin film polyimide membrane capped with Si₃N₄ thin layer is used as actuator membrane which is able to deform through thermal forces inside an isolated chamber. The fabricated membrane will be suitable for thermo-pneumatic-based membrane actuation for lab-on-chip application.

The actuator device consisting of a micro-heater, a Si-based micro-chamber and a heat-sensitive square-shaped membrane is fabricated using surface and bulk-micromachining process, with an additional adhesive bonding process. The polyimide membrane is capped with a thin silicon nitride layer that is fabricated by using etch stop technique and spin coating.

The deformation property of the membrane depend on the volumetric expansion of air particles in the heat chamber as a result of temperature increase generated from the micro-heater inside the chamber. Preliminary testing showed that the fabricated micro-heater has the capability to generate heat in the chamber with a temperature increase of 18.8 °C/min. Analysis on membrane deflection against temperature increase showed that heat-sensitive thin polyimide membrane can perform the deflection up to 65 μm for a temperature increase of 57°C.

The dual layer polyimide capped with Si₃N₄ was used as the membrane material. The nitride layer allowed the polyimide membrane for working at extreme heat condition. The process technique is simple implementing standard micro-electro-mechanical systems process.

The purpose of this study is to design and characterize the dielectrophoretic (DEP) microelectrodes with various array structure arrangements in order to produce optimum non-uniform electric field for particle capture. The DEP-electrodes with 2D electrode structure was fabricated and characterized to see the effect of electrode structure configuration on the capture capability of the cells suspending in the solution.

The presented microelectrode array structures are made of planar conductive metal structure having same size and geometry. Dielectrophoretic force (F_DEP) generated in the fluidic medium is initially simulated using COMSOL Multi-physics performed on two microelectrodes poles, which is then continued on three-pole microelectrodes. The proposed design is fabricated using standard MEMS fabrication process. Furthermore, the effect of different sinusoidal signals of 5, 10 and 15 volt peak to peak voltage (V_pp) at fixed frequency of 1.5 MHz on capturing efficiency of microelectrodes were also investigated using graphite metalloids particles as the suspended particles in the medium. The graphite particles that are captured at the microelectrode edges are characterized over a given time period.

Based on analysis, the capturing efficiency of microelectrodes at the microelectrode edges is increased as voltage input increases, confirming its dependency to the F_DEP strength and direction of non-uniform electric field. This dependency to field consequently increases the surface area of the accumulated graphite. It is also showed that the minimum ratio of the surface accumulated area of captured graphite is 1, 2.75 and 9 μm2 for 5, 10 and 15 V_pp, respectively. The simulation result also indicates a significant improvement on the performance of microelectrodes by implementing third pole in the design. The third pole effect the particles in the medium by creating stronger non-uniform electric field as well as more selective force toward the microelectrodes’ edges.

The microelectrode array arrangement is found as a reliable method to increase the strength and selectivity of non-uniform electric field distribution that affect F_DEP. The presented findings are verified through experimental test and simulation results.

The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane.

Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition.

The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material.

Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.

The purpose of this paper is to visualize protein manipulation using dielectrophoresis (DEP) as a substantial perspective on being an effective protein analysis and biosensor method as DEP is able to be used as a means for manipulation, fractionation, pre-concentration and separation. This research aims to quantify DEP using an electrochemical technique known as cyclic voltammetry (CV), as albumin is non-visible without any fluorescent probe or dye.

The principles of DEP were generated by an electric field on tapered DEP microelectrodes. The principle of CV was analysed using different concentrations of albumin on a screen-printed carbon electrode. Using preliminary data from both DEP and CV methods as a future prospect for the integration of both techniques to do electrical quantification of DEP forces.

The size of the albumin is known to be 0.027 µm. Engineered polystyrene particle of size 0.05 µm was selected to mimic the DEP actuation of albumin. Positive DEP of the sample engineered polystyrene particle was able to be visualized clearly at 10 MHz supplied with 20 Vpp. However, negative DEP was not able to be visualized because of the limitation of the apparatus. However, albumin was not able to be visualized under the fluorescent microscope because of its translucent properties. Thus, a method of electrical quantification known as the CV technique is used. The detection of bovine serum albumin (BSA) using the CV method is successful. As the concentration of BSA increases, the peak current obtained from the voltammogram decreases. The peak current can be an indicator of DEP response as it correlates to the adsorption of the protein onto the electrodes. The importance of the results from both CV and DEP shows that the integration of both techniques is possible.

The integration of both methods could give rise to a new technique with precision to be implemented into the dialyzers used in renal haemodialysis treatment for manipulation and sensing of protein albumin.

The purpose of this paper is to use a particle velocity measurement technique on a tapered microelectrode device via changes of an applied voltage, which is an enhancement of the electric field density in influencing the dipole moment particles. Polystyrene microbeads (PM) have used to determine the responses of the dielectrophoresis (DEP) voltage based on the particle velocity technique.

Analytical modelling was used to simulate the particles’ polarization and their velocity based on the Clausius–Mossotti Factor (CMF) equation. The electric field intensity and DEP forces were simulated through the COMSOL numerical study of the variation of applied voltages such as 5 V p-p, 7 V p-p and 10 V p-p. Experimentally, the particle velocity on a tapered DEP response was quantified via the particle travelling distance over a time interval through a high-speed camera adapted to a high-precision non-contact depth measuring microscope.

The result of the particle velocity was found to increase, and the applied voltage has enhanced the particle trajectory on the tapered microelectrode, which confirmed its dependency on the electric field intensity at the top and bottom edges of the electrode. A higher magnitude of particle levitation was recorded with the highest particle velocity of 11.19 ± 4.43 µm/s at 1 MHz on 10 V p-p, compared to the lowest particle velocity with 0.62 ± 0.11 µm/s at 10 kHz on 7 V p-p.

This research can be applied for high throughout sensitivity and selectivity of particle manipulation in isolating and concentrating biological fluid for biomedical implications.

The comprehensive manipulation method based on the changes of the electrical potential of the tapered electrode was able to quantify the magnitude of the particle trajectory in accordance with the strong electric field density.

The purpose of this paper is to analyse the operation of p-type side gate junctionless silicon transistor (SGJLT) in accumulation region through experimental measurements and 3-D TCAD simulation results. The variation of electric field components, carrier’s concentration and valence band edge energy towards the accumulation region is explored with the aim of finding the origin of SGJLT performance in the accumulation operational condition.

The device is fabricated by atomic force microscopy nanolithography on silicon-on-insulator wafer. The output and transfer characteristics of the device are obtained using 3-D Technology Computer Aided Design (TCAD) Sentaurus software and compared with experimental measurement results. The advantages of AFM nanolithography in contact mode and Silicon on Insulator (SOI) technology were implemented to fabricate a simple structure which exhibits the behaviour of field effect transistors. The device has 200-nm channel length, 100-nm gate gap and 4 μm for the distance between the source and drain contacts. The characteristics of the fabricated device were measured using an Agilent HP4156C semiconductor parameter analyzer (SPA). A 3-D TCAD Sentaurus tool is used as the simulation platform. The Boltzmann statistics is adopted because of the low doping concentration of the channel. Hydrodynamic model is taken to be as the main transport model for all simulations, and the quantum mechanical effects are ignored. A doping dependent Masetti mobility model was also included as well as an electric field dependent model with Shockley–Read–Hall (SRH) carrier recombination/generation.

We have obtained that the device is a normally on state device mainly because of the lack of work functional difference between the gate and the channel. Analysis of electric field components’ variation, carrier’s concentration and valence band edge energy reveals that increasing the negative gate voltage drives the device into accumulation region; however, it is unable to increase the drain current significantly. The positive slope of the hole quasi-Fermi level in the accumulation region presents mechanism of carriers’ movement from source to drain. The influence of electric field because of drain and gate voltage on charge distribution explains a low increasing of the drain current when the device operates in accumulation regime.

The proposed side gate junctionless transistors simplify the fabrication process, because of the lack of gate oxide and physical junctions, and implement the atomic force microscopy nanolithography for fabrication process. The optimized structure with lower gap between gate and channel and narrower channel would present the output characteristics near the ideal transistors for next generation of scaled-down devices in both accumulation and depletion region. The presented findings are verified through experimental measurements and simulation results.

Muslim consumers’ tendency to patronize stores with Halal images and purchase genuine Halal products is closely related to their effort to maintain Islamic identity, and this is further supported by many empirical data. Therefore, this paper aims to examine the relationships between attitude, subjective norm, perceived behavioral control and Halal principle knowledge and their effect on Muslim consumers’ behavioral intention to patronize retail stores. On top of that, the mediating effect of Halal image on these relationships is also investigated.

Data were analyzed using multiple and hierarchical regression analysis to test the model via the Statistical Package for the Social Sciences (SPSS) software among 480 valid samples of Muslim consumers.

Empirical results of the hierarchical regression analysis and the Sobel test revealed that there is a significant mediating effect of Halal image on the relationship between consumers’ attitude, subjective norm and perceived behavioral control of consumers’ behavioral intention to patronize retail stores. Consumers with high attentiveness of the stores’ Halal image have a positive impression of the stores, a high motivation to patronize and, without any conditions, may follow through their intention to patronize the retail stores.

This research study offers guidelines to the retailers, marketers and the authorities in enhancing marketing strategies and the implementation of stricter Halal consumption laws. Hence, this research puts forward the following strategies: adopting Halal marketing strategy, promoting Halal images in retail stores and reinforcing Halal principle knowledge in the mind of consumers.

The main theoretical contribution relates to the insertion of the Halal image as a mediating variable in the matter of Muslim consumers’ behavioral intention to patronize Halal stores in Malaysia. An inspection of the effect of Halal principle knowledge on Muslim consumers’ behavioral intention to patronize retail stores is also rewarding.