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Structures play a very important role in developing pressure sensors with good sensitivity and linearity, as they undergo deformation to the input pressure and function as the primary sensing element of the sensor. To achieve high sensitivity, thinner diaphragms are required; however, excessively thin diaphragms may induce large deflection and instability, leading to the unfavorable performances of a sensor in terms of linearity and repeatability. Thereby, importance is given to the development of innovative structures that offer good linearity and sensitivity. This paper aims to investigate the sensitivity of a bossed diaphragm coupled fixed guided beam three-dimensional (3D) structure for pressure sensor applications.

The proposed sensor comprises of mainly two sensing elements: the first being the 3D mechanical structure made of bulk silicon consisting of boss square diaphragm along with a fixed guided beam landing on to its center, forming the primary sensing element, and the diffused piezoresistors, which form the secondary sensing element, are embedded in the tensile and compression regions of the fixed guided beam. This micro mechanical 3 D structure is packaged for applying input pressure to the bottom of boss diaphragm. The sensor without pressure load has no deflection of the diaphragm; hence, no strain is observed on the fixed guided beam and also there is no change in the output voltage. When an input pressure P is applied through the pressure port, there is a deformation in the diaphragm causing a deflection, which displaces the mass and the fixed guided beam vertically, causing strain on the fixed guided beam, with tensile strain toward the guided end and compressive strain toward the fixed end of the close magnitudes. The geometrical dimensions of the structure, such as the diaphragm, boss and fixed guided beam, are optimized for linearity and maximum strain for an applied input pressure range of 0 to 10 bar. The structure is also analyzed analytically, numerically and experimentally, and the results are compared.

The structure offers equal magnitudes of tensile and compressive stresses on the surface of the fixed guided beam. It also offers good linearity and sensitivity. The analytical, simulation and experimental studies of this sensor are introduced and the results correlate with each other. Customized process steps are followed wherein two silicon-on-insulator (SOI) wafers are fusion bonded together, with SOI-1 wafer used to realize the diaphragm along with the boss and SOI-2 wafer to realize the fixed guided beam, leading to formation of a 3D structure. The geometrical dimensions of the structure, such as the diaphragm, boss and fixed guided beam, are optimized for linearity and maximum strain for an applied input pressure range of 0 to10 bar.

This paper presents a unique and compact 3D micro-mechanical structure pressure sensor with a rigid center square diaphragm (boss diaphragm) and a fixed guided beam landing at its center, with diffused piezoresistors embedded in the tensile and compression regions of the fixed guided beam. A total of six masks were involved to realize and fabricate the 3D structure and the sensor, which is presumed to be the first of its kind in the fabrication of MEMS-based piezoresistive pressure sensor.

The performance of oil-filled pressure cores is very much affected by the corrugated diaphragm and the oil filling volume. The purpose of this paper is to show the effects of different corrugated diaphragms, different oil filling volumes and different treatments of the corrugated diaphragms on the performance of pressure sensors.

Pressure-sensitive cores with different diaphragm diameters, different diaphragm ripple numbers and different oil filling volumes are produced, and thermal cycling is introduced to improve the diaphragm performance, and finally the performance of each pressure-sensitive core is tested and the test data are analyzed and compared.

The experimental results show that the larger the diameter of the corrugated diaphragm used for encapsulation, the better the performance. For pressure-sensitive cores using smaller diameter corrugated diaphragms, the performance of one corrugation is better than that of two corrugations. When the number of corrugations and the diameter are the same size, the performance of the outer ring of the diaphragm with concave corrugations is better than that with convex corrugations. At the same time, the diaphragm after thermal cycling treatment and appropriate reduction of encapsulated oil filling can improve the performance of the pressure-sensitive core.

By exploring the effects of corrugated diaphragm and oil filling volume on the performance of oil-filled pressure cores, the design of oil-filled pressure sensors can be guided to improve sensor performance.

The purpose of this study is to find a new design that can increase the sensitivity of the sensor without sacrificing the linearity. A novel and very efficient method for increasing the sensitivity of MEMS pressure sensor has been proposed for the first time. Rather than perforation, we propose patterned thinning of the diaphragm so that specific regions on it are thinner. This method allows the diaphragm to deflect more in response with regard to the pressure. The best excavation depth has been calculated and a pressure sensor with an optimal pattern for thinned regions has been designed. Compared to the perforated diaphragm with the same pattern, larger output voltage is achieved for the proposed sensor. Unlike the perforations that have to be near the edges of the diaphragm, it is possible for the thin regions to be placed around the center of the diaphragm. This significantly increases the sensitivity of the sensor. In our designation, we have reached a 60 per cent thinning (of the diaphragm area) while perforations larger than 40 per cent degrade the operation of the sensor. The proposed method is applicable to other MEMS sensors and actuators and improves their ultimate performance.

Instead of perforating the diaphragm, we propose a patterned thinning scheme which improves the sensor performance.

By using thinned regions on the diaphragm rather than perforations, the sensitivity of the sensor was improved. The simulation results show that the proposed design provides larger membrane deflections and higher output voltages compared to the pressure sensors with a normal or perforated diaphragm.

The proposed MEMS piezoelectric pressure sensor for the first time takes advantage of thinned diaphragm with optimum pattern of thinned regions, larger outputs and larger sensitivity compared with the simple or perforated diaphragm pressure sensors.

PHOTOGRAPHIC details of various aircraft and missiles recently released in conjunction with the Soviet air show at Tushino Airport on July 9, 1961, has provided a basis for the start of an evaluation of Soviet air‐to‐air rocket weapons. These pictorial data, coupled with Russian textbooks, as well as evidence of Soviet interest in the guided‐missile work of the Western Powers, indicated by the material that has been translated from English into Russian,1 has led to this brief evaluation of their work in this field.

In this paper, an experimental apparatus was designed and subsequent theoretical analysis and simulations were conducted on the effectiveness and advantages of a novel laser beam scan localization (BLS) system.

The system used a moving location assistant (LA) with a laser beam, through which the deployed area was scanned. The laser beam sent identity documents (IDs) to unknown nodes to obtain the sensor locations.

The results showed that the system yielded significant benefits compared with other localization methods, and a high localization accuracy could be achieved without the aid of expensive hardware on the sensor nodes. Furthermore, four positioning mode features in this localization system were realized and compared.

In this paper, an experimental apparatus was designed and subsequent theoretical analysis and simulations were conducted on the effectiveness and advantages of a novel laser BLS system. The system used a moving LA with a laser beam, through which the deployed area was scanned. The laser beam sent IDs to unknown nodes to obtain the sensor locations.

This paper presents an overview of the x‐ray guided robotic radiosurgery system that has been developed for the ablation of solid tumors. A robot‐mounted linear accelerator is directed through a sequence of positions and orientations designed to deliver high radiation dosages focused at a specific location. Patient movement during treatment is identified by stereo x‐ray measurements and the robotic system adjusts the linear accelerator prior to the delivery of radiation at each location. The result is accurate delivery without rigid fixation of the tumor relative to the treatment system.

The purpose of this study is to present the state of the art for fiber Bragg grating (FBG) acceleration sensing technologies from two aspects: the principle of the measurement dimension and the principle of the sensing configuration. Some commercial sensors have also been introduced and future work in this field has also been discussed. This paper could provide an important reference for the research community.

This review is to present the state of the art for FBG acceleration sensing technologies from two aspects: the principle of the measurement dimension (one-dimension and multi-dimension) and the principle of the sensing configuration (beam type, radial vibration type, axial vibration type and other composite structures).

The current research on developing FBG acceleration sensors is mainly focused on the sensing method, the construction and design of the elastic structure and the design of a new information detection method. This paper hypothesizes that in the future, the following research trends will be strengthened: common single-mode fiber grating of the low cost and high utilization rate; high sensitivity and strength special fiber grating; multi-core fiber grating for measuring single-parameter multi-dimensional information or multi-parameter information; demodulating equipment of low cost, small volume and high sampling frequency.

The principle of the measurement dimension and principle of the sensing configuration for FBG acceleration sensors have been introduced, which could provide an important reference for the research community.

The purpose of this paper is to present a constraint and corresponding algorithm enhancing the evolutionary structural optimization (ESO) method, aiming to circumvent its structure break down problem in some special cases, such as the tie-beam problem.

A virtual soft material introduced to an element will change the stiffness of the element and may consequently change the stress distribution of that element and its neighbors. With this property, the virtual stiffness of the selected element is calculated and the threshold of the stress changes is derived. The stress threshold is used to evaluate the role of an element on the load path and therefore decide the contribution of the element to the structure. Adding this checking operation into the original ESO iterations enables validation of element removal.

The reason for structure break down with the ESO method is that the element removal criterion of ESO only works for certain optimal objectives. It cannot guarantee that the structure does not fail. The proposed operation offers a stronger and stricter constraint condition for ESO’s element removal process, preventing the structure from breaking down in some special cases.

The tests on several examples reported in the literature show that the proposed method has the same ability to achieve an optimum solution as the original ESO methods do, while avoiding incorrect deletion of structurally important elements. The benchmark tie-beam problem is solved successfully with this algorithm. The method can be used in other situations as well.

This paper aims to design metaguide- or metasurface-based compact inexpensive beam-steering devices, which play an important role in modern cellular networks, radar imaging and satellite communication.

This paper uses finite element analysis to study, design and optimize arrays of resonating elements as beam steering devices. The first set of such devices involves metamaterial-based apertures fed by a waveguide, tunable via the permittivity of the host material. In the second approach, dynamic beam steering is effected by alternating between two or more waveguide feeds.

Particular examples show how the direction of the main lobe of the radiated beam can be reliably switched by approximately 30° in one of the quadrants by changing a single global control parameter within a very reasonable range.

The findings pave the way for the design and fabrication of inexpensive compact beam steering devices. This study anticipates that the proposed designs can be further improved and fine-tuned using “heavy duty” optimization packages.

In many published designs of similar beam-steering devices, the radiation pattern of an array of resonating elements is controlled by complex circuitry, so that each radiating element is tuned separately. In contrast with these existing approaches, the designs rely just on a simple global control parameter.

The purpose of this paper is to investigate an optical‐based scanning modality for the real‐time measurements of automotive interior gaps.

The hardware is based on a charge‐coupled device detector acquiring a laser illumination. The laser is projected on multitude of substrates with different reflectivities and surface profiles; while the scanning is progressed manually through a hand‐held setup.

The proposed software identifies the optical gap location automatically and establishes a dynamic field of view.

The study conducts a tool reliability and repeatability study that yield an accuracy of 0.08 mm and a repeatability of less than 6.5 percent as user bias. The developed hardware/software combination, when compared with two commercial systems; a 3D scanner and an industrially packaged sensor unit used for exterior gaps, which provided repeatability values of 24 and 17 percent, respectively, with accuracies of 1.5 and 0.34 mm.

New hardware and software are developed in combination to operate effectively on different deco finish and gap separations.