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Article
Publication date: 8 July 2021

Ahmad Sauffi Yusof, Zainuriah Hassan, Sidi Ould Saad Hamady, Sha Shiong Ng, Mohd Anas Ahmad, Way Foong Lim, Muhd Azi Che Seliman, Christyves Chevallier and Nicolas Fressengeas

The purpose of this paper is to investigate the effect of growth temperature on the evolution of indium incorporation and the growth process of InGaN/GaN heterostructures.

Abstract

Purpose

The purpose of this paper is to investigate the effect of growth temperature on the evolution of indium incorporation and the growth process of InGaN/GaN heterostructures.

Design/methodology/approach

To examine this effect, the InGaN/GaN heterostructures were grown using Taiyo Nippon Sanso Corporation metal-organic chemical vapor deposition (MOCVD) SR4000-HT system. The InGaN/GaN heterostructures were epitaxially grown on 3.4 µm undoped-GaN (ud-GaN) and GaN nucleation layer, respectively, over a commercial 2” c-plane flat sapphire substrate. The InGaN layers were grown at different temperature settings ranging from 860°C to 820°C in a step of 20°C. The details of structural, surface morphology and optical properties were investigated using X-ray diffraction (XRD), field emission scanning electron microscope (FE-SEM), atomic force microscopy and ultraviolet-visible (UV-Vis) spectrophotometer, respectively.

Findings

InGaN/GaN heterostructure with indium composition up to 10.9% has been successfully grown using the MOCVD technique without any phase separation detected within the sensitivity of the instrument. Indium compositions were estimated through simulation fitting of the XRD curve and calculation of Vegard’s law from UV-Vis measurement. The thickness of the structures was determined using the Swanepoel method and the FE-SEM cross-section image.

Originality/value

This paper report on the effect of MOCVD growth temperature on the growth process of InGaN/GaN heterostructure, which is of interest in solid-state lighting technology, especially in light-emitting diodes and solar cell application.

Details

Microelectronics International, vol. 38 no. 3
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 1 March 1996

L. Kadinski and M. Perić

The paper presents a numerical technique for the simulation of theeffects of grey‐diffusive surface radiation on fluid flow using a finitevolume procedure for two‐dimensional…

Abstract

The paper presents a numerical technique for the simulation of the effects of grey‐diffusive surface radiation on fluid flow using a finite volume procedure for two‐dimensional (plane and axi‐symmetric) geometries. The governing equations are solved sequentially, and the non‐linearities and coupling of variables are accounted for through outer iterations (coefficients updates). In order to reduce the number of outer iterations, a multigrid algorithm was implemented. The radiating surface model assumes a non‐participating medium, semi‐transparent walls and constant elementary surface temperature and radiation fluxes. The calculation of view factors is based on the analytical evaluation for the plane geometry and numerical integration for axi‐symmetric geometry. Ashadowing algorithm was implemented for the calculation of view factors in general geometries. The method for the calculation of view factors was first tested by comparison with available analytical solutions for a complex geometric configuration. The flow prediction code combined with radiation heat transfer was verified by comparisons with analytical one‐dimensional solutions. Further test calculations were done for the flow and heat transfer in a cavity with a radiating submerged body. As an example of the capabilities of the method, transport processes in metalorganic chemical vapour deposition (MOCVD) reactors were simulated.

Details

International Journal of Numerical Methods for Heat & Fluid Flow, vol. 6 no. 3
Type: Research Article
ISSN: 0961-5539

Keywords

Article
Publication date: 19 July 2021

Mohd Ann Amirul Zulffiqal Md Sahar, Zainuriah Hassan, Sha Shiong Ng, Way Foong Lim, Khai Shenn Lau, Ezzah Azimah Alias, Mohd Anas Ahmad, Nur Atiqah Hamzah and Rahil Izzati Mohd Asri

The aims of this paper is to study the effects of the V/III ratio of indium gallium nitride (InGaN) quantum wells (QWs) on the structural, optical and electrical properties of…

Abstract

Purpose

The aims of this paper is to study the effects of the V/III ratio of indium gallium nitride (InGaN) quantum wells (QWs) on the structural, optical and electrical properties of near-ultraviolet light-emitting diode (NUV-LED).

Design/methodology/approach

InGaN-based NUV-LED is successfully grown on the c-plane patterned sapphire substrate at atmospheric pressure using metal organic chemical vapor deposition.

Findings

The indium composition and thickness of InGaN QWs increased as the V/III ratio increased from 20871 to 11824, according to high-resolution X-ray diffraction. The V/III ratio was also found to have an important effect on the surface morphology of the InGaN QWs and thus the surface morphology of the subsequent layers. Apart from that, the electroluminescence measurement revealed that the V/III ratio had a major impact on the light output power (LOP) and the emission peak wavelength of the NUV-LED. The LOP increased by up to 53% at 100 mA, and the emission peak wavelength of the NUV-LED changed to a longer wavelength as the V/III ratio decreased from 20871 to 11824.

Originality/value

This study discovered a relation between the V/III ratio and the properties of QWs, which resulted in the LOP enhancement of the NUV-LED. High TMIn flow rates, which produced a low V/III ratio, contribute to the increased LOP of NUV-LED.

Details

Microelectronics International, vol. 38 no. 3
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 7 August 2007

James A. Hunt

This paper seeks to describe automated lamp manufacturing.

1051

Abstract

Purpose

This paper seeks to describe automated lamp manufacturing.

Design/methodology/approach

The paper provides information on the automated manufacture of incandescent, fluorescent and light‐emitting diodes (LEDs).

Findings

The paper finds that the automated manufacture of conventional lamp types is similar, but LEDs require totally different techniques developed from the semiconductor industry.

Originality/value

The paper should be of value in terms of understanding the basics of automated lamp manufacturing, especially with LEDs, as these will be highly important general lighting products to save energy and provide innovation in lighting design in the near future.

Details

Assembly Automation, vol. 27 no. 3
Type: Research Article
ISSN: 0144-5154

Keywords

Article
Publication date: 1 April 1994

E. Cebrián and F.J. Mustieles

The progress of semiconductor fabrication technology, particularly the heteroepitaxial technology (MOCVD, MBE, etc.) has permitted the fabrication of structures and devices whose…

Abstract

The progress of semiconductor fabrication technology, particularly the heteroepitaxial technology (MOCVD, MBE, etc.) has permitted the fabrication of structures and devices whose behaviour is dominated by ballistic and/or quantum‐interference effects through heterojunctions.

Details

COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, vol. 13 no. 4
Type: Research Article
ISSN: 0332-1649

Article
Publication date: 13 April 2010

Li Xin, Wang Jiwu, Huang Lucheng, Li Jiang and Li Jian

The purpose of this paper is to propose a new hybrid approach based on bibliometrics analysis (BA), morphology analysis (MA) and conjoint analysis (CA) to help identify new

Abstract

Purpose

The purpose of this paper is to propose a new hybrid approach based on bibliometrics analysis (BA), morphology analysis (MA) and conjoint analysis (CA) to help identify new technology development opportunities.

Design/methodology/approach

A new hybrid approach based on BA, MA and CA has been conducted to help identify new technology development opportunities. The proposed hybrid process is illustrated with a case example of blue light‐emitting diode (LED) based on GaN.

Findings

In this paper, the proposed hybrid process is illustrated with a case example of document information from a blue light‐emitting diode (LED) based on GaN documents database. The results show that the configuration “Al2O3+MBE+two dimensional photonic crystal” should be given greater attention with respect to R&D activities in future.

Practical implications

This paper is of interest for technology opportunities analysis practitioners and policymakers at the industrial and government levels.

Originality/value

This paper proposes a new hybrid approach of technology opportunities analysis based on bibliometrics analysis, morphology analysis and conjoint analysis methods.

Details

Foresight, vol. 12 no. 2
Type: Research Article
ISSN: 1463-6689

Keywords

Article
Publication date: 10 June 2022

Nur Atiqah Hamzah, Mohd Ann Amirul Zulffiqal Md Sahar, Aik Kwan Tan, Mohd Anas Ahmad, Muhammad Fadhirul Izwan Abdul Malik, Chin Chyi Loo, Wei Sea Chang and Sha Shiong Ng

This study aims to investigate the effects of indium composition on surface morphology and optical properties of indium gallium nitride on gallium nitride (InGaN/GaN…

Abstract

Purpose

This study aims to investigate the effects of indium composition on surface morphology and optical properties of indium gallium nitride on gallium nitride (InGaN/GaN) heterostructures.

Design/methodology/approach

The InGaN/GaN heterostructures were grown on flat sapphire substrates using a metal-organic chemical vapour deposition reactor with a trimethylindium flow rate of 368  sccm. The indium composition of the InGaN epilayers was controlled by applying different substrate temperatures. The surface morphology and topography were observed using field emission scanning electron microscope (F.E.I. Nova NanoSEM 450) and atomic force microscopy (Bruker Dimension Edge) with a scanning area of 10 µm × 10 µm, respectively. The compositional analysis was done by Energy Dispersive X-Ray Analysis. Finally, the ultraviolet-visible (UV-Vis) spectrophotometer (Agilent Technology Cary Series UV-Vis-near-infrared spectrometer) was measured from 200 nm to 1500 nm to investigate the optical properties of the samples.

Findings

The InGaN/GaN thin films have been successfully grown at three different substrate temperatures. The indium composition reduced as the temperature increased. At 760 C, the highest indium composition was obtained, 21.17%. This result was acquired from the simulation fitting of ω−2θ scan on (0002) plane using LEPTOS software by Bruker D8 Discover. The InGaN/GaN shows significantly different surface morphologies and topographies as the indium composition increases. The thickness of InGaN epilayers of the structure was ∼300 nm estimated from the field emission scanning electron microscopy. The energy bandgap of the InGaN was 2.54 eV – 2.79 eV measured by UV-Vis measurements.

Originality/value

It can be seen from this work that changes in substrate temperature can affect the indium composition. From all the results obtained, this work can be helpful towards efficiency improvement in solar cell applications.

Details

Microelectronics International, vol. 40 no. 1
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 2 August 2021

Nur Atiqah Hamzah, Mohd Anas Ahmad, Rahil Izzati Mohd Asri, Ezzah Azimah Alias, Mohd Ann Amirul Zulffiqal Md Sahar, Ng Sha Shiong and Zainuriah Hassan

The purpose of this paper is to enhance the efficiency of the LED by introducing three-step magnesium (Mg) doping profile. Attention was paid to the effects of the Mg doping…

Abstract

Purpose

The purpose of this paper is to enhance the efficiency of the LED by introducing three-step magnesium (Mg) doping profile. Attention was paid to the effects of the Mg doping concentration of the first p-GaN layer (i.e. layer close to the active region). Attention was paid to the effects of the Mg doping concentration of the first p-GaN layer (i.e. layer close to the active region).

Design/methodology/approach

Indium gallium nitride (InGaN)–based light-emitting diode (LED) was grown on a 4-inch c-plane patterned sapphire substrate using metal organic chemical vapor deposition. The Cp2Mg flow rates for the second and third p-GaN layers were set at 50 sccm and 325 sccm, respectively. For the first p-GaN layer, the Cp2Mg flow rate varied from 150 sccm to 300 sccm to achieve different Mg dopant concentrations.

Findings

The full width at half maximum (FWHM) for the GaN (102) plane increases with increasing Cp2Mg flow rate. FWHM for the sample with 150, 250 and 300 sccm Cp2Mg flow rates was 233 arcsec, 236 arcsec and 245 arcsec, respectively. This result indicates that the edge and mixed dislocations in the p-GaN layer were increased with increasing Cp2Mg flow rate. Atomic force microscopy (AFM) results reveal that the sample grown with 300 sccm exhibits the highest surface roughness, followed by 150 sccm and 250 sccm. The surface roughness of these samples is 2.40 nm, 2.12 nm and 2.08 nm, respectively. Simultaneously, the photoluminescence (PL) spectrum of the 250 sccm sample shows the highest band edge intensity over the yellow band ratio compared to that of other samples. The light output power measurements found that the sample with 250 sccm exhibits high output power because of sufficient hole injection toward the active region.

Originality/value

Through this study, the three steps of the Mg profile on the p-GaN layer were proposed to show high-efficiency InGaN-based LED. The optimal Mg concentration was studied on the first p-GaN layer (i.e. layer close to active region) to improve the LED performance by varying the Cp2Mg flow rate. This finding was in line with the result of PL and AFM results when the samples with 250 sccm have the highest Mg acceptor and good surface quality of the p-GaN layer. It can be deduced that the first p-GaN layer doping has a significant effect on the crystalline quality, surface roughness and light emission properties of the LED epi structure.

Details

Microelectronics International, vol. 38 no. 3
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 17 August 2021

Zulkifli Azman, Nafarizal Nayan, Megat Muhammad Ikhsan Megat Hasnan, Nurafiqah Othman, Anis Suhaili Bakri, Ahmad Shuhaimi Abu Bakar, Mohamad Hafiz Mamat and Mohd Zamri Mohd Yusop

This study aims to investigate the effect of temperature applied at the initial deposition of Aluminium Nitride (AlN) thin-film on a silicon substrate by high-power impulse…

122

Abstract

Purpose

This study aims to investigate the effect of temperature applied at the initial deposition of Aluminium Nitride (AlN) thin-film on a silicon substrate by high-power impulse magnetron sputtering (HiPIMS) technique.

Design/methodology/approach

HiPIMS system was used to deposit AlN thin film at a low output power of 200 W. The ramping temperature was introduced to substrate from room temperature to maximum 100°Cat the initial deposition of thin-film, and the result was compared to thin-film sputtered with no additional heat. For the heat assistance AlN deposition, the substrate was let to cool down to room temperature for the remaining deposition time. The thin-films were characterized by X-ray diffraction (XRD) and atomic force microscope (AFM) while the MIS Schottky diode characteristic investigated through current-voltage response by a two-point probe method.

Findings

The XRD pattern shows significant improvement of the strong peak of the c-axis (002) preferred orientation of the AlN thin-film. The peak was observed narrowed with temperature assisted where FWHM calculated at 0.35° compared to FWHM of AlN thin film deposited at room temperature at around 0.59°. The degree of crystallinity of bulk thin film was improved by 28% with temperature assisted. The AFM images show significant improvement as low surface roughness achieved at around 0.7 nm for temperature assisted sample compares to 3 nm with no heat applied.

Originality/value

The small amount of heat introduced to the substrate has significantly improved the growth of the c-axis AlN thin film, and this method is favorable in the deposition of the high-quality thin film at the low-temperature process.

Details

Microelectronics International, vol. 38 no. 3
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 1 April 2003

T. Lalinsky´, Sˇ. Haščík, Ž. Mozolová, E. Burian, M. Krnáč, M. Tomáška, J. Škriniarová, M. Drzˇík, I. Kosticˇ and L. Matay

A new micromachining technology of mechanically fixed and thermally insulated cantilevers, bridges and islands was developed to be used for design of GaAs heterostructure based…

Abstract

A new micromachining technology of mechanically fixed and thermally insulated cantilevers, bridges and islands was developed to be used for design of GaAs heterostructure based microelectromechanical systems (MEMS) devices. Based on the micromachining technology, two different MEMS devices were designed and analyzed. The first one was micromechanical thermal converter (MTC) and the second one was a micromechanical coplanar waveguide (MCPW). The basic electro‐thermal as well as microwave properties of the MEMS devices designed are investigated. The results obtained are also supported by simulation. The advantages of the fixed micromechanical structures in the field of design of new MEMS devices are discussed.

Details

Microelectronics International, vol. 20 no. 1
Type: Research Article
ISSN: 1356-5362

Keywords

1 – 10 of 57