Film deposition for gas sensors

Sensor Review

ISSN: 0260-2288

Article publication date: 1 June 2000




(2000), "Film deposition for gas sensors", Sensor Review, Vol. 20 No. 2.



Emerald Group Publishing Limited

Copyright © 2000, MCB UP Limited

Film deposition for gas sensors

Film deposition for gas sensors

Keywords: Polymers, Electrodeposition, Sensors, Gas sensors

Applicants: Michael Kenneth Andrews (NZ), Paul David Harris (NZ), Ind Res Ltd. (NZ), Ashton Cyril Partridge (NZ)Patent number: WO9811279Publication date: 19 March 1998Title: Deposition of thin electroconductive polymer film of desired resistance for gas sensing applications

The invention comprises a method and apparatus for depositing conducting polymer films for use in gas sensing applications and an apparatus for measuring resistance changes in thin conducting polymer films and gas sensing applications. It provides a method which enables a thin polymer film of controlled resistance to be deposited on a microelectrode array to form a resistance probe, and a method for operating such a gas sensing array in which the effect of self-heating of the film can be minimized or avoided and inherent l/f sensor noise minimised.

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