Investigation of the processing effects of UV, heat and laser ablation on SU‐8 microturbines: A first approach by small angle neutron scattering
Multidiscipline Modeling in Materials and Structures
ISSN: 1573-6105
Article publication date: 24 September 2010
Issue publication date: 24 September 2010
Abstract
Purpose
The purpose of this paper is to determine the nano‐sized characteristics of SU‐8 polymer micro‐electromechanical systems airflow metrology turbines samples. These microturbines were made to be the first using axial airflow for low air pressure response. This polymer may be affected during curing by UV and heat baking, as well as confined heat from laser ablation. Defects in the resin matrix may influence the material quality and hence the final turbine performance.
Design/methodology/approach
Small angle neutron scattering investigations were performed using the instrumentation of the Budapest Research Reactor.
Findings
The average sizes of the voids/cracks in the resin matrix of the turbines were determined and allowed the viability of making smaller even thinner rotor blades for higher spin and electrical output capability to be considered.
Originality/value
The obtained results have advanced the industrial applicability of the adopted technique in the considered sector of polymer analysis.
Keywords
Citation
Heaton, M.E., Rogante, M., Len, A. and Denieffe, D. (2010), "Investigation of the processing effects of UV, heat and laser ablation on SU‐8 microturbines: A first approach by small angle neutron scattering", Multidiscipline Modeling in Materials and Structures, Vol. 6 No. 3, pp. 364-372. https://doi.org/10.1108/15736101011080105
Publisher
:Emerald Group Publishing Limited
Copyright © 2010, Emerald Group Publishing Limited