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Based on the micro-electro-mechanical system (MEMS) technology, acoustic emission sensors have gained popularity owing to their small size, consistency, affordability and easy integration. This study aims to provide direction for the advancement of MEMS acoustic emission sensors and predict their future potential for structural health detection of microprecision instruments.

This paper summarizes the recent research progress of three MEMS acoustic emission sensors, compares their individual strengths and weaknesses, analyzes their research focus and predicts their development trend in the future.

Piezoresistive, piezoelectric and capacitive MEMS acoustic emission sensors are the three main streams of MEMS acoustic emission sensors, which have their own advantages and disadvantages. The existing research has not been applied in practice, and MEMS acoustic emission sensor still needs further research in the aspects of wide frequency/high sensitivity, good robustness and integration with complementary metal oxide semiconductor. MEMS acoustic emission sensor has great development potential.

In this paper, the existing research achievements of MEMS acoustic emission sensors are described systematically, and the further development direction of MEMS acoustic emission sensors in the future research field is pointed out. It provides an important reference value for the actual weak acoustic emission signal detection in narrow structures.

The purpose of this paper through the redundant monitoring unit reflecting the real-time temperature change of the array, an adaptive refresh circuit based on temperature is designed.

This paper proposed a circuit design for temperature-adaptive refresh with a fixed refresh frequency of traditional memory, high refresh power consumption at low temperature and low refresh frequency at high temperature.

Adding a metal oxide semiconductor (MOS) redundancy monitoring unit consistent with the storage unit to the storage bank can monitor the temperature change of the storage bank in real time, so that temperature-based memory adaptive refresh can be implemented.

According to the characteristics that the data holding time of dynamic random access memory storage unit decreases with the increase of temperature, a MOS redundant monitoring unit which is consistent with the storage unit is added to the storage array with the 2T storage unit as the core.

The purpose of this paper is to provide details of biomimetic and neuromorphic sensor research and developments and discuss their applications in robotics.

Following a short introduction, this first provides examples of recent biomimetic gripping and sensing skin research and developments. It then considers neuromorphic vision sensing technology and its potential robotic applications. Finally, brief conclusions are drawn.

Biomimetics aims to exploit mechanisms, structures and signal processing techniques which occur in the natural world. Biomimetic sensors and control techniques can impart robots with a range of enhanced capabilities such as learning, gripping and multidimensional tactile sensing. Neuromorphic vision sensors offer several key operation benefits over conventional frame-based imaging techniques. Robotic applications are still largely at the research stage but uses are anticipated in enhanced safety systems in autonomous vehicles and in robotic gripping.

This illustrates how tactile and imaging sensors based on biological principles can contribute to imparting robots with enhanced capabilities.

In the measurement of liquid density and viscosity, the change of resonance parameters due to the parasitic parallel capacitance of resonator affects the measurement accuracy. To improve the accuracy, a method was proposed to compensate the parasitic parallel capacitance of resonator by adding an electrode.

The new electrode (compensation electrode) was added into resonant sensor to make compensation capacitance. The closer the compensation capacitance was to the parasitic parallel capacitance, the better compensation was. The structural parameters of resonant sensor with the compensation electrode were determined by the simulation and experiment.

The effect of this method was examined by the experiment. The relative errors of density and viscosity were less than 0.15, 0.5 % and standard deviations were less than 0.0004 g/cm³ and 0.005 mPas, respectively.

The experimental results show that this method is valuable for the parasitic parallel capacitance compensation of immersed resonant sensor.

This paper has not been published in other journals.