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The paper focuses on design, fabrication and characterization of electromagnetic microgenerators with integrated rectifying circuits to convert AC output signal to DC one. The work includes research on simulation of voltage-rectifying circuits, including charge pump, realization of the experimental printed circuit board (PCB) with selected electronic circuits and the execution of the final structure with integrated rectifying circuit. Measurements were performed on these circuits.

Electromagnetic microgenerators include multipole permanent magnets secured on rotor three-phase brushless direct current (BLDC) motor and planar multilayer multiple coils. These were fabricated using low temperature co-fired ceramics (LTCC) technology. In our experiment, six rectifying circuits were simulated and tested with a structure consisting of eight layers of coils and with an outer diameter of 50 mm fabricated earlier.

The microgenerator with Graetz bridge generates higher output power than the modified charge pump at the same rotary speed. However, it is less stable for the distance change between the structure and the magnets than the modified charge pump, which has more constant output power in a wider range of load resistance.

The presented electronic rectifying circuits are novel for LTCC-based electromagnetic microgenerator application. The structure with integrated rectifying circuits allows generation of electrical output power larger than 100 mW at the rotor speed of about 8,000 rpm.

This paper aims to focus on the fabrication and characterization of mixed thin-/thick-film thermoelectric microgenerators, based on magnetron sputtered constantan (copper–nickel alloy) and screen-printed silver. To improve the adhesion of the constantan layer to the applied substrates, the additional chromium sublayer was used. The aim of the study was to investigate the influence of chromium sublayer on the electrical and thermoelectric properties of such hybrid microgenerators.

Fabrication of such structures consisted of several steps – magnetron sputtering of the chromium and then constantan layer, exposing the first arms of thermocouples, applying the second arms by screen-printing technology and firing the prepared structures in a belt furnace. The structures were made both on Al₂O₃ (alumina) and low temperature co-fired ceramics (LTCC) substrates.

To the best of the authors’ knowledge, for the first time, laser ablation process was applied to fabricate the first arms of thermocouples from a layer of constantan only or constantan with a chromium sublayer. Geometric measurements have shown that the mapping of mask pattern by laser ablation technique is very accurate.

The determined Seebeck coefficient of the realized structures was about 40.4 µV/K. After firing the exemplary structures at 850°C peak temperature, Seebeck coefficient is increased to an average value of 51 µV/K.