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The paper aims to propose a three‐dimensional (3D) finite element analysis to evaluate the electrical performances of a FBAR (thin‐film bulk acoustic resonator) resonator.

The piezoelectric theory that uses an equivalent circuit is able to evaluate the thickness‐extensional vibration modes in simple 1D configuration but it is not adequate to predict spurious modes with lateral wave vector. Therefore, a fully 3D finite element analysis has been carried out to evaluate the characteristics of a real FBAR prototype that has been fabricated in a research center.

The measured characteristics of the FBAR prototype are compared with simulations obtained by the 3D finite element analysis. The agreement between experimental and numerical results confirms the accuracy of the proposed technique.

The paper proposes a 3‐D numerical approach to design and analyze the electrical characteristics of a real FBAR which has been fabricated following the guidelines obtained by the proposed numerical design.

This paper aims to propose a new model to study the relationship between the acoustic properties of the thickness shear mode (TSM) in lateral field excited (LFE) film bulk acoustic wave resonator (FBAR) and the gap distance of the surface electrodes.

In the finite element analysis, harmonic and modal analyses are performed to obtain the admittance spectrum and determine the mechanical vibration mode. The results are used to modify the ideal model used in the theoretical calculation.

In the case of LFE FBAR, the acoustic velocity and electromechanical coupling coefficient (K2) of the TSM decreases as the gap distance decreases and there is a compromise between the exciting effectiveness and the acoustic properties.

The paper proposes a new method to study the dependences of the acoustic properties of the lateral field excited FBAR on the gap distances of the surface electrodes through the extraction of the static capacitance based on the finite element simulation results.