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The measurement of heat flux is of importance to the development of aerospace engine as basic physical quantities in extreme environment. Heat radiation is one of the basic forms of heat transfer phenomenon. The structure optimizing can improve the performance and infrared absorptivity of the thin film sensor.

This paper designed one kind of thin film heat flux sensor (HFS) with antireflective coating based on transparent conductive oxide thermopile. The introduced membrane structure is so thin that it has little impact on sensor performance. Fabrication of thin film sensors were fabricated by physical vapor deposition (PVD) process.

The steady-state and dynamic response characteristics of the HFS were investigated by calibration platform. The experimental results shown that the absorptivity of the membrane structure (for1070nm) improved compared with that before optimization. The sensitivity of heat flux gauge was 48.56 µV/ (kW/m2) and its frequency response was determined to be about 1980 Hz.

The thin film HFS uses thermopile based on Indium Tin Oxid and In2O3. The antireflective coating is introduced to hot endpoint of HFS to improve sensitivity on laser thermal source. The infrared optical properties of membrane layer structure were investigated. The steady-state and the transient response characteristics of the heat flux sensor were also investigated.