Keywords
Citation
(2001), "New Load Port is the first in the industry to meet new SEMI automation standard", Microelectronics International, Vol. 18 No. 1. https://doi.org/10.1108/mi.2001.21818aad.011
Publisher
:Emerald Group Publishing Limited
Copyright © 2001, MCB UP Limited
New Load Port is the first in the industry to meet new SEMI automation standard
New Load Port is the first in the industry to meet new SEMI automation standard
Keywords: AJS Automation, Automation, Standards
AJS Automation has designed the first load port to meet the new BOLTS/Light standard (SEMI E15.1) for fab automation.
The BOLTS/Light standard was developed for 300mm labs that require full-lab automation. The standard calls for load ports with a higher level of interchangeability and quick attachment and detachment capabilities to allow automated transport of front-opening, unified pods (FOUP).
The new OEM3001 load port (Plate 5) has a simple, modular design that is light and compact with a smaller form factor than competitors' models. In addition, the OEM3001 costs 20 to 40 percent less than other load ports. A patent is pending on the new design.
Plate 5
OEM3001 load port
The new load ports are currently in beta testing and will be available for shipping by the end of this year.
Further details: Geary Chase, AJS Automation, Tel: +1 978 356 7303; E-mail: gchase@ajsautomation.com