Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems

Microelectronics International

ISSN: 1356-5362

Publication date: 1 December 2000

Abstract

Keywords

Citation

(2000), "Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems", Microelectronics International, Vol. 17 No. 3. https://doi.org/10.1108/mi.2000.21817cad.015

Download as .RIS

Publisher

:

Emerald Group Publishing Limited

Copyright © 2000, MCB UP Limited

Please note you might not have access to this content

You may be able to access this content by login via Shibboleth, Open Athens or with your Emerald account.
If you would like to contact us about accessing this content, click the button and fill out the form.
To rent this content from Deepdyve, please click the button.