Keywords
Citation
(2000), "Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems", Microelectronics International, Vol. 17 No. 3. https://doi.org/10.1108/mi.2000.21817cad.015
Publisher
:Emerald Group Publishing Limited
Copyright © 2000, MCB UP Limited
Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems
Frequency shift tuning RF power generators enable ultra-thin film deposition in high-speed coating systems
Keywords Manitou Systems, Generators, Thin film, Coating
Manitou Systems, Inc. has introduced a new frequency shift tuning (FST) RF generator that changes frequency electronically. The new generator dramatically reduces tuning time, enabling ultra thin films to be deposited uniformly from run-to-run, significantly increasing process repeatability.
The new CesarTM FST generator is the latest addition to the Cesar line of RF power generators manufactured in Stolberg, Germany by Dresslet HF, and distributed and serviced by Manitou Systems in the USA. Cesar FST generators are coupled to fixed or variable impedance-matching networks to provide a high-speed and reliable method for plasma ignition and tuning. Repeatability of the plasma process results in higher throughput and reduced costs without sacrificing the thin flim quality.
The new generators can be used for a wide variety of thin film applications including sputtering, etching, CVD and excitation of ion beam and high density plasma sources. Since the tuning is performed electronically instead of mechanically, there are no moving parts, increasing reliability and decreasing maintenance.
For further information, please contact: Steven M. Simons. Tel: 203 792 8797; ext: 302; E-mail: ssimons@manitousys.com