NUMERICAL SIMULATION OF ELECTRON TRAJECTORIES FOR EELS

Abstract

Electron energy loss spectrometers (EELS) for surface studies require a high energy resolution (▵E ? 3 meV) monochromatic electron beam with the highest possible current. In order to improve the transmission of such a device, and so the achievable current, a 3D simulation of electron trajectories taking into account space charge effects was performed for typical three lenses cathode systems, electrostatic cylindrical deflector analyzer (CDA 127°) and acceleration lenses. The results of the analysis are presented and their effects on the overall design of the device are discussed.

Citation

Vattuoneb, L., Repettoa, M. and Roccab, M. (1992), "NUMERICAL SIMULATION OF ELECTRON TRAJECTORIES FOR EELS", COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, Vol. 11 No. 1, pp. 85-88. https://doi.org/10.1108/eb051758