A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor
H. Moilanen
(Microelectronics and Material Physics Laboratories, University of Oulu, Oulu, Finland)
S. Leppävuori
(Microelectronics and Material Physics Laboratories, University of Oulu, Oulu, Finland)
58
Citation
Moilanen, H. and Leppävuori, S. (1995), "A Screen Printed Multilayer PZT Actuator with an Integrated Force Sensor", Microelectronics International, Vol. 12 No. 2, pp. 28-30. https://doi.org/10.1108/eb044562
Publisher
:Emerald Group Publishing Limited
Copyright © 1995, Emerald Group Publishing Limited