Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

Abstract

A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of substrates. This technique, using a flexible system of laser microlithography on planar (2‐D) or three‐dimensional (3‐D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies.

Citation

Arnone, C., Giaconia, C., Pace, C. and Greco, M. (1994), "Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries", Microelectronics International, Vol. 11 No. 1, pp. 18-21. https://doi.org/10.1108/eb044519