Reports the design, fabrication and packaging of a micromachined silicon/Pyrex based chip for the polymerase chain reaction (PCR). The anodic bonding method is used for sealing the chambers of 1μl volume with a Pyrex glass wafer. Platinum resistors on the back of the wafer are used as heaters and temperature sensors. The chip is externally cooled by forced air to achieve rapid temperature cycling. The transparency of the Pyrex makes it possible for using optical readout methods. The packaging is especially designed for easy handling, filling, power connection, temperature regulation and optical readout. The mass production of such silicon reactors could make single‐shot throwaway devices economically viable.
Schabmueller, C.G.J., Evans, A.G.R., Brunnschweiler, A., Ensell, G., Leslie, D.L. and Lee, M.A. (2000), "Packaging of closed chamber PCR‐chips for DNA amplification", Microelectronics International, Vol. 17 No. 2, pp. 11-14. https://doi.org/10.1108/13565360010332381
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