This paper deals with the coupled mechanical‐electrostatic analysis of a shunt capacitive MEMS switch. The mechanical and electrostatic parts of the problem are modelled by the FE and BE methods, respectively. The fast multipole method is applied to reduce the storage requirements and the computational cost of the BE electrostatic model. An adaptive truncation expansion of the 3D Laplace Green function is employed. The strong interaction between the mechanical and electrostatic systems is considered iteratively.
Sabariego, R.V., Gyselinck, J., Dular, P., De Coster, J., Henrotte, F. and Hameyer, K. (2004), "Coupled mechanical‐electrostatic FE‐BE analysis with FMM acceleration: Application to a shunt capacitive MEMS switch", COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, Vol. 23 No. 4, pp. 876-884. https://doi.org/10.1108/03321640410553300
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