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The paper aims to present numerical modeling and technology of a very first three axial low temperature cofired ceramics (LTCC) accelerometer.

Low temperature cofired ceramics technology was applied in the fabrication process of the novel device. The numerical modeling was used to predict the properties of the accelerometer, moreover, design of the experiment methodology was used to reduce time of simulation and to get as much as information from the experiment as possible.

The low temperature cofired ceramics make it possible to fabricate three axial accelerometer.

The presented device is just a first prototype. Therefore, further research work will be needed to improve structural drawbacks and to analyze precisely the device reliability and parameters repeatability.

The device presented in the paper can be applied in systems working in a harsh environment (high temperature and humidity). Ceramic sensors can withstand temperatures up to 600°C.

This paper presents novel three axial LTCC accelerometer.

The paper aims to present the influence of the co-firing process conditions of low temperature co-fired ceramics (LTCC) on the deformation of thin LTCC membranes.

The statistical design of the experiment methodology was used in the frame of these investigations to reduce the time and costs of the experiments and to ensure easier interpretation of the obtained results. Moreover, this conception permits the rough estimation of the membrane deflection fired at optimal process conditions.

The applied design of the experiment methodology allowed the researchers to find the optimal co-firing process conditions and to estimate the membrane deflection at the optimal process conditions. The estimation fits well with the results of real measurement that was conducted to confirm the estimation precision.

The experiment was conducted for only one type of LTCC, DP951. The precision of the design of the experiment optimization and estimation of the response at optimal conditions depend on the described object. Therefore, the findings of this paper do not have to be generally true for other LTCC tapes, and if other LTCC tapes deformation should be investigated, then similar analysis shall be conducted for them.

The deformation of LTCC membranes affects the sensitivity and repeatability of LTCC acceleration and pressure sensors. Hence, the decrease of membrane deflection increases the usability of LTCC in such applications.

This paper presents simple optimization of co-firing process conditions of LTCC devices using statistical design of the experiment.

The purpose of this paper is to present the application of low temperature cofired ceramics (LTCC) technology in the fabrication of a novel electronic device, which consists of an antenna amplifier integrated with temperature stabilizer. The temperature controller consists of a thick‐film thermistor and heater, which has been optimized using geometry to achieve uniform temperature distribution on the whole electronic substrate.

LTCC technology was applied in the fabrication process of the novel device. The temperature distribution on the ceramic substrate and temperature stabilization time were analyzed using an IR camera. The heating ability of the heater was tested in a climatic chamber. The heater and thermistors parameters variability were estimated using a basic mathematical statistic.

The integrated device ensures proper temperature conditions of electronic components if the ambient temperature is lower than −40°C.

The presented device is just a first prototype. Therefore, the fabrication of the next structures and further experiments will be needed to improve structural drawbacks and to analyze precisely the device reliability and parameters repeatability.

The device presented in the paper can be applied in systems working at very low ambient temperatures (even at −5°C). Moreover, a temperature stabilizer can increase the temperature of the whole device above −40°C, therefore, standard electronic components (which can work down to −40°C) can be used instead of specialized ones (which can work below −40°C).

This paper presents a novel temperature stabilizer.