Keywords
Citation
(2006), "MEMS capacitive sensor for physiologic parameter measurement", Sensor Review, Vol. 26 No. 3. https://doi.org/10.1108/sr.2006.08726cad.007
Publisher
:Emerald Group Publishing Limited
Copyright © 2006, Emerald Group Publishing Limited
MEMS capacitive sensor for physiologic parameter measurement
Applicant: Rich Collin A (US);Zhang Yafan (US); Najafi Nader (US)Patent number: US2002115920Publication date: 22 August 2002
Keywords: Patents, Transport engineering, Sensors
The present invention defines an implantable microfabricated sensor device for measuring a physiologic parameter of interest within a patient. The sensor device includes a substrate and a sensor, integrally formed with the substrate that is responsive to the physiologic parameter of interest. At least one conductive path is integrally formed with said substrate and coupled to the sensor. Connected to the conductive path is an active circuit. The active circuit is further electrically connected to the sensor.