Citation
(1998), "Portable maintenance and troubleshooting tool downloads wafer temperature data files to spreadsheets for off-line analysis", Sensor Review, Vol. 18 No. 1. https://doi.org/10.1108/sr.1998.08718aad.006
Publisher
:Emerald Group Publishing Limited
Copyright © 1998, MCB UP Limited
Portable maintenance and troubleshooting tool downloads wafer temperature data files to spreadsheets for off-line analysis
Portable maintenance and troubleshooting tool downloads wafer temperature data files to spreadsheets for off-line analysis
SensArray® Corporation has announced the Thermal TRACK™ 2.1 wafer temperature measurement system with enhanced data exporting capabilities that allows downloading temperature data files to spreadsheets. Users can now perform statistical analysis of thermal cycle temperature data for process optimization and problem solving using a variety of popular spreadsheets, such as Microsoft® Excel. Thermal TRACK is a hand-held maintenance and troubleshooting tool for extremely accurate, real-time, in situ wafer temperature measurement on photolithography track processes. It monitors, logs, and analyses temperatures under actual process conditions using a special calibration wafer instrumented with an array of up to 17 resistance temperature detectors. The Thermal TRACK display shows a wafer image with digital temperature indicators at each sensor location and calculates minimum, maximum, and average temperature.
SensArray's Thermal TRACK™
temperature measurement system
Thermal TRACK applications include calibrating or monitoring temperature set points on resist bake and chill plates, measuring hot and chill plate uniformity, troubleshooting temperature-related critical dimension problems, and running predefined preventive maintenance checks. Absolute accuracy is ± 0.1°C, and point-to-point profile precision is ± 0.05°C performance critical to deep UV lithography processes that rely on extremely temperature-dependent chemically amplified resists. Calibration is traceable to NIST.
To take full advantage of the power of Thermal TRACK, its temperature data can be downloaded to SensArray's Thermal MAP 2 system for advanced analysis. Thermal MAP transforms the data into meaningful graphical displays so process engineers can instantly visualize and understand thermal effects. Displays include full colour contour plots, 3D surface plots of temperature profiles, and "movies" of contour or 3D plots that show temperature variation across the wafer over time using the animation option.
For further information contact: SensArray Corporation, 3410 Garrett Drive, Santa Clara, CA 95054. Tel: 408 727 4656; Fax: 408 496 6929; Internet: info@sensarray.com