Tutorial: silicon micro‐machining
Paul Wilson
(Fulmer Research Ltd)
828
Abstract
This extract from a recent survey of micro‐machining in the USA outlines the techniques and difficulties of this ‘upwardly mobile’ technology.
Citation
Wilson, P. (1990), "Tutorial: silicon micro‐machining", Sensor Review, Vol. 10 No. 4, pp. 178-181. https://doi.org/10.1108/eb007830
Publisher
:MCB UP Ltd
Copyright © 1990, MCB UP Limited