Keywords
Citation
(1999), "Hydromatix inaugurates first of its kind, closed loop, copper abatement system for CMP", Circuit World, Vol. 25 No. 3. https://doi.org/10.1108/cw.1999.21725cab.019
Publisher
:Emerald Group Publishing Limited
Copyright © 1999, MCB UP Limited
Hydromatix inaugurates first of its kind, closed loop, copper abatement system for CMP
USA
Hydromatix inaugurates first of its kind, closed loop, copper abatement system for CMP
Keywords Hydromatix, Recycling, Water treatment
Hydromatix, Inc., a designer and manufacturer of high performance wastewater recycling technology has installed and started up a closed-loop waste abatement system for Applied Materials Inc.'s milestone EPIC Facility. EPIC (Equipment and Process Integration Center) in Santa Clara, California, houses all the equipment and processes needed for semiconductor manufacturers to develop and test a completely integrated multi-level metal copper interconnect process before installing it in their own fab facility.
The patented Hydromatix 786 System removes all traces of copper from the EPIC facility's effluent stream. Using new filtration and separation techniques, the process transforms all copper-bearing aqueous solutions, primarily from CMP and wet cleaning technologies, into deionized (DI) water, returning it for facility reuse. Copper solutions from the company's electroplating deposition technology are also treated in ion exchange modules. The only waste products that leave the system are highly concentrated small-volume solids that are sent to appropriate disposal facilities.
The systems are specifically designed to provide maximum reuse of water while at the same time producing the minimum volume of residual waste. Hydromatix's Web site is http://www.hydromatix.com