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Numerical simulation of inductively coupled plasma flows under chemical non‐equilibrium

Gérard Degrez (von Karman Institute for Fluid Dynamics (VKI), Rhode St‐Gense, Belgium Service de Mécanique des Fluides, Université Libre de Bruxelles (ULB), Bruxelles, Belgium)
David Vanden Abeele (von Karman Institute for Fluid Dynamics (VKI), Rhode St‐Gense, Belgium Service de Mécanique des Fluides, Université Libre de Bruxelles (ULB), Bruxelles, Belgium)
Paolo Barbante (von Karman Institute for Fluid Dynamics (VKI), Rhode St‐Gense, Belgium Dipartimento di Matematica, Politecnico di Milano, Milano, Italy)
Benot Bottin (von Karman Institute for Fluid Dynamics (VKI), Rhode St‐Gense, Belgium Institut Suprieur Industriel de Bruxelles (ISIB), Bruxelles, Belgium)

International Journal of Numerical Methods for Heat & Fluid Flow

ISSN: 0961-5539

Article publication date: 1 June 2004

Abstract

This paper presents a detailed review of the numerical modeling of inductively coupled air plasmas under local thermodynamic equilibrium and under chemical non‐equilibrium. First, the physico‐chemical models are described, i.e. the thermodynamics, transport phenomena and chemical kinetics models. Particular attention is given to the correct modelling of ambipolar diffusion in multi‐component chemical non‐equilibrium plasmas. Then, the numerical aspects are discussed, i.e. the space discretization and iterative solution strategies. Finally, computed results are presented for the flow, temperature and chemical concentration fields in an air inductively coupled plasma torch. Calculations are performed assuming local thermodynamic equilibrium and under chemical non‐equilibrium, where two different finite‐rate chemistry models are used. Besides important non‐equilibrium effects, we observe significant demixing of oxygen and nitrogen nuclei, which occurs due to diffusion regardless of the degree of non‐equilibrium in the plasma.

Keywords

Citation

Degrez, G., Vanden Abeele, D., Barbante, P. and Bottin, B. (2004), "Numerical simulation of inductively coupled plasma flows under chemical non‐equilibrium", International Journal of Numerical Methods for Heat & Fluid Flow, Vol. 14 No. 4, pp. 538-558. https://doi.org/10.1108/09615530410532286

Publisher

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Emerald Group Publishing Limited

Copyright © 2004, Emerald Group Publishing Limited