Micromachined gyroscopic sensors
Rob Yates
(Rob Yates is Professor of Microsystems Technology in the Department of Engineering, Sheffield Hallam University, Pond Street, Sheffield S1 1WB, UK. Tel: +44 (0)114 225 4916; E‐mail: r.yates@shu.ac.uk)
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Abstract
Many new micromachined angular rate sensors (gyroscopes) are now commercially available. Their rapid development has been mainly due to the automotive industry. A wide range of different devices exists and their performance is significantly improving every year while costs are falling. Much effort is now under way for large volume production. This article provides a general overview of gyroscopic sensors and also describes a novel micromachined rotating device.
Keywords
Citation
Yates, R. (1999), "Micromachined gyroscopic sensors", Sensor Review, Vol. 19 No. 1, pp. 43-45. https://doi.org/10.1108/02602289910255577
Publisher
:MCB UP Ltd
Copyright © 1999, MCB UP Limited