The fast‐moving world of MEMS technology
Article publication date: 25 September 2009
The purpose of this paper is to provide a technical review of silicon micro‐electromechanical systems (MEMS) technology and its applications.
Following an introduction, the paper describes silicon MEMS fabrication and assembly techniques, considers a selection of commercially important products and their applications and concludes with a brief review of power MEMS research.
Silicon MEMS fabrication technology is derived from techniques used in semiconductor manufacture and has yielded a diverse and ever‐growing range of sensors, actuators and other miniaturised devices that find applications in a multitude of industries.
This paper provides a detailed technical review of MEMS technology and its applications.
Bogue, R. (2009), "The fast‐moving world of MEMS technology", Assembly Automation, Vol. 29 No. 4, pp. 313-320. https://doi.org/10.1108/01445150910987718
Emerald Group Publishing Limited
Copyright © 2009, Emerald Group Publishing Limited