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Article
Publication date: 1 April 2004

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Microelectronics International, vol. 21 no. 1
Type: Research Article
ISSN: 1356-5362

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Publication date: 1 August 2004

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Microelectronics International, vol. 21 no. 2
Type: Research Article
ISSN: 1356-5362

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Publication date: 1 April 2000

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Microelectronics International, vol. 17 no. 1
Type: Research Article
ISSN: 1356-5362

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Microelectronics International, vol. 16 no. 2
Type: Research Article
ISSN: 1356-5362

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Publication date: 1 September 2006

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Microelectronics International, vol. 23 no. 3
Type: Research Article
ISSN: 1356-5362

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Microelectronics International, vol. 17 no. 2
Type: Research Article
ISSN: 1356-5362

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Microelectronics International, vol. 16 no. 2
Type: Research Article
ISSN: 1356-5362

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Publication date: 1 April 2002

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Microelectronics International, vol. 19 no. 1
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 1 December 2002

Jaroslaw Kita, Andrzej Dziedzic, Leszek J. Golonka and Tomasz Zawada

This paper presents possibility of laser application for fabrication of 3D elements and structures. The Aurel NAVS‐30 Laser Trimming and Cutting System with special…

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This paper presents possibility of laser application for fabrication of 3D elements and structures. The Aurel NAVS‐30 Laser Trimming and Cutting System with special software was used. It was applied successfully for fabrication of vias (minimum diameter – 50 μm) in fired and unfired LTCC ceramics and channels with width between 100 μm and 5 mm. The achievements and problems are presented and discussed. The influence of lamination process on quality of vias and channels as well as the problems connected with interaction of laser beam with ceramic tapes are shown. Three‐dimensional resistors and microfluidic system were successfully designed and fabricated based on our investigations. Chosen electrical and thermal parameters of constructed devices are shown, too.

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Microelectronics International, vol. 19 no. 3
Type: Research Article
ISSN: 1356-5362

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Article
Publication date: 1 January 2006

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Microelectronics International, vol. 23 no. 1
Type: Research Article
ISSN: 1356-5362

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