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Article
Publication date: 5 December 2017

Peng Wang, Yulong Zhao, You Zhao, Qi Zhang and Anjiang Cai

The purpose of this paper is proposed a new structure design for high performance accelerometer.

Abstract

Purpose

The purpose of this paper is proposed a new structure design for high performance accelerometer.

Design/methodology/approach

An improved sensitivity structure considering sensitivity, natural frequency and cross-axis sensitivity is established and realized. The proposed structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer and eliminate the lateral sensitivity effect by the specific configuration, which is made possible by incorporating slots into the eight-beam structure. The mechanical model and its mathematical solution are established for calculating the sensitivity and natural frequency behavior of the designed structure. The developed sensor is fabricated on the n-type single-crystal silicon wafer and packaged for experiment. The accelerometer prototype was tested in the centrifugal machine and dynamic calibration system.

Findings

The experimental results show that the sensitivity of the designed sensor is 0.213 mV/(Vg) and the natural frequency of the sensor is 14.22 kHz. Compared with some piezoresistive accelerometers in literatures, the designed sensor possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in measuring high frequency vibration signals.

Originality/value

The accelerometer with slotted eight-beam structure shows a good performance in the static and dynamic experiments and can be used in measuring high frequency vibration signals.

Details

Sensor Review, vol. 38 no. 1
Type: Research Article
ISSN: 0260-2288

Keywords

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Article
Publication date: 19 June 2017

Bian Tian, Huafeng Li, Ning Yang, Yulong Zhao, Pei Chen and Hanyue Liu

It is significant to know the real-time indexes about the turbulence flow of the ocean system, which has a deep influence on ocean productivity, distribution of the ocean…

Abstract

Purpose

It is significant to know the real-time indexes about the turbulence flow of the ocean system, which has a deep influence on ocean productivity, distribution of the ocean populations and transmission of the ocean energy, especially the measurement of turbulence flow velocity. So, it is particularly urgent to provide a high-sensitivity, low-cost and reliable fluid flow sensor for industry and consumer product application. This paper aims to design a micro fluid flow sensor with a cross beam membrane structure. The designed sensor can detect the fluid flow velocity and has a low kinetic energy dissipation rate.

Design/methodology/approach

In this paper, a micro fluid flow sensor with a cross beam membrane structure is designed to measure the ocean turbulence flow velocity. The design, simulation, fabrication and measurement of the designed sensor are discussed. By testing the simply packaged sensor in the fluid flow and analyzing the experiments data, the results show that the designed sensor has favorable performance.

Findings

The paper describes the tests of the designed sensor, and the experimental results show that the designed sensor can measure the fluid flow velocity and has a sensitivity of 11.12 mV/V/(m/s)2 and a low kinetic energy dissipation rate in the range of 10-6-10-4 W/kg.

Originality/value

This paper provides a micro-electro-mechanical systems fluid flow sensor used to measure ocean turbulence flow velocity.

Details

Sensor Review, vol. 37 no. 3
Type: Research Article
ISSN: 0260-2288

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Article
Publication date: 22 June 2012

Liu Yan, Zhao Yulong and Lu Sun

The purpose of this paper is to provide an improved structural design for accelerometers based on cantilever beam‐mass structure and offer the descriptions of sensor…

Abstract

Purpose

The purpose of this paper is to provide an improved structural design for accelerometers based on cantilever beam‐mass structure and offer the descriptions of sensor fabrication, packaging and experiments.

Design/methodology/approach

The cantilever beam‐membrane (CB‐membrane) structure is designed as the sensing element for piezoresistive accelerometers. In the CB‐membrane structure, a cantilever beam and two identical membranes as a whole part supports the proof mass. Four piezoresistors are distributed on the surface of the cantilever beam to form a Wheatstone bridge. Finite element method is used to carry out the structural analysis and determine the sensor dimensions. The sensor chip is fabricated by bulk micro‐machining technique, packaged in dual‐in‐line (DIP) way and tested.

Findings

Compared with the conventional cantilever beam‐mass (CB‐mass) structure, the CB‐membrane structure can improve the sensor's performances, including response frequency, output linearity and cross‐axis sensitivity. The results of simulation and experiments prove that the CB‐membrane accelerometer has good performances.

Research limitations/implications

The accelerometer is simply packaged and the zero offset voltage has not been compensated. Moreover, the measured response frequency is lower than the simulated value. Further work and study are needed to solve these problems.

Originality/value

The accelerometer with CB‐membrane structure has good performances as the static and dynamic experiments show and is suitable to detect the spindle vibration of the machine tools.

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Article
Publication date: 26 August 2014

Bian Tian, Yulong Zhao, Zhe Niu and Jiang Zhuangde

The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes…

Abstract

Purpose

The purpose of this paper is to report on a piezoresistive pressure sensor for micro-pressure measurement with a cross-beam membrane (CBM) structure. This study analyzes the dynamic characteristics of the proposed device.

Design/methodology/approach

This CBM sensor possesses high stiffness and sensitivity, measuring dynamic pressure more effectively in a high-frequency environment compared with other piezoresistive structures. The dynamic characteristics are derived using the finite element method to analyze the dynamic responses of the new structure, including natural frequency and lateral effect performances. The CBM dynamic performances are compared with traditional structures.

Findings

The pressure sensor performance was evaluated, and the experimental results indicate that they all exhibit similar dynamic characteristics as the designed model. Compared with traditional structures such as the single island, the CBM proves to be superior in evaluating the dynamic performances of pressure sensors at high frequencies of > 30 kHz.

Originality/value

Most studies of this micro pressure sensors attempt to promote the sensitivity or focus on the static performance of pressure sensor with micro gauge. This study is concerned with analyze the dynamic characterism of micro pressure sensor and compared with the traditional structures, that prove the CBM structure has stable dynamic performance and is a better option for measuring dynamic micro pressure in biomedical applications.

Details

Sensor Review, vol. 34 no. 4
Type: Research Article
ISSN: 0260-2288

Keywords

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Article
Publication date: 10 June 2014

Zhongliang Yu, Yulong Zhao, Lili Li, Cun Li, Xiawei Meng and Bian Tian

The purpose of this study is to develop a piezoresistive absolute micro-pressure sensor for altimetry. For this application, both high sensitivity and high overload…

Abstract

Purpose

The purpose of this study is to develop a piezoresistive absolute micro-pressure sensor for altimetry. For this application, both high sensitivity and high overload resistance are required. To develop a piezoresistive absolute micro-pressure sensor for altimetry, both high sensitivity and high-overload resistance are required. The structure design and optimization are critical for achieving the purpose. Besides, the study of dynamic performances is important for providing a solution to improve the accuracy under vibration environments.

Design/methodology/approach

An improved structure is studied through incorporating sensitive beams into the twin-island-diaphragm structure. Equations about surface stress and deflection of the sensor are established by multivariate fittings based on the ANSYS simulation results. Structure dimensions are determined by MATLAB optimization. The silicon bulk micromachining technology is utilized to fabricate the sensor prototype. The performances under both static and dynamic conditions are tested.

Findings

Compared with flat diaphragm and twin-island-diaphragm structures, the sensor features a relatively high sensitivity with the capacity of suffering atmosphere due to the introduction of sensitive beams and the optimization method used.

Originality/value

An improved sensor prototype is raised and optimized for achieving the high sensitivity and the capacity of suffering atmosphere simultaneously. A general optimization method is proposed based on the multivariate fitting results. To simplify the calculation, a method to linearize the nonlinear fitting and optimization problems is presented. Moreover, a differential readout scheme attempting to decrease the dynamic interference is designed.

Details

Sensor Review, vol. 34 no. 3
Type: Research Article
ISSN: 0260-2288

Keywords

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Article
Publication date: 27 March 2009

Zhou Gaofeng, Zhao Yulong and Jiang Zhuangde

The flexibly thin film grid pressure sensor is mainly used to detect the interface pressure distribution between touching objects. Aim at larger measurement error, the…

Abstract

Purpose

The flexibly thin film grid pressure sensor is mainly used to detect the interface pressure distribution between touching objects. Aim at larger measurement error, the strip double sensing layer pressure sensor are designed and fabricated and tested.

Design/methodology/approach

Defects and characteristic of the flexibly thin film grid pressure sensor based on piezoresistive effect are analyzed and pointed out in this paper. After comparison of four sensors, the strip double sensing layer pressure sensor was thought to be best.

Findings

Experiment shows that the strip double sensing layer pressure sensor could eliminate the measurement error basically and illustrates the validity of measuring the interface pressure distribution between area touching objects.

Research limitations/implications

In this paper, only the strip double sensing layer pressure sensor was used to verify the validity of measuring the static interface pressure distribution between peach and platform. But there also exists some problems such as the adhering reliability of electrode and the unevenness of sensing layer. These problems could be overcome in the future research if the fabricating procedure and ingredient of material could be adjusted correctly.

Practical implications

The strip double sensing layer pressure sensor could be applied to detect the static interface pressure distribution such as peach pressure distribution. For dynamic measurement, this research needs to be done further.

Originality/value

Strip double sensing layer pressure sensor with simple “interlayer” structure and with low manufacture cost is presented to basically eliminate the measurement error of interface pressure distribution of original sensor.

Details

Sensor Review, vol. 29 no. 2
Type: Research Article
ISSN: 0260-2288

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Article
Publication date: 14 September 2010

Bian Tian, Yulong Zhao and Zhuangde Jiang

The purpose of this paper is to investigate the disadvantages of traditional sensors and establish a new structure for pressure measurement.

Abstract

Purpose

The purpose of this paper is to investigate the disadvantages of traditional sensors and establish a new structure for pressure measurement.

Design/methodology/approach

A kind of novel piezoresistive micro‐pressure sensor with a cross‐beam membrane (CBM) structure is designed based on the silicon substrate. Through analyzing the stress distribution of the new structure by finite element method, the model of structure is established and compared with traditional structures. The fabrication is operated on silicon wafer, which applies the technology of anisotropy chemical etching and inductively coupled plasma.

Findings

Compared to the traditional C‐ and E‐type structures, this new CBM structure has the advantages of low nonlinearity and high sensitivities by the cross‐beam on the membrane, which cause the stress is more concentrated in sensitive area and the deflections that relate to the linearity are decreased.

Originality/value

The paper provides the first empirical reports on the new piezoresistive structure for the pressure measurement by fabricating a cross‐beam on the membrane and resolving the conflict of nonlinearity and sensitivity of the piezoresistive sensors.

Details

Sensor Review, vol. 30 no. 4
Type: Research Article
ISSN: 0260-2288

Keywords

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Article
Publication date: 7 September 2012

Xuefeng Zhang, Yulong Zhao and Xuelei Zhang

The purpose of this paper is to provide a thin tactile force sensor array based on conductive rubber and to offer descriptions of the sensor design, fabrication and test.

Abstract

Purpose

The purpose of this paper is to provide a thin tactile force sensor array based on conductive rubber and to offer descriptions of the sensor design, fabrication and test.

Design/methodology/approach

The sensor array consists of a sandwich structure. Sensing elements are distributed discretely in the sensor. Each sensing element has two electrodes and a piece of conductive rubber with piezoresistive property. The electrodes, as well as the conductive trace for signal transmission, are printed on the substrate layer by the screen printing technique. A scanning circuit based on zero potential method and an experimental set‐up based on balance to characterize the sensor array are designed and implemented in the test of the sensor array.

Findings

Experimental results verify the validity of the sensor array in measuring the vertical tactile force between the sensing elements and the object.

Research limitations/implications

In this paper, all the sensors are tested without calibration procedures and the procedure of the dynamic test is implemented by manual operation.

Practical implications

The sensor array could be applied to measure the plantar force for gait detection in clinical applications.

Originality/value

The paper presents a tactile force sensor array with discrete sensing elements to essentially restrict the cross‐talk among sensing elements. This paper will provide many practical details that can help others in the field.

Details

Sensor Review, vol. 32 no. 4
Type: Research Article
ISSN: 0260-2288

Keywords

Content available
Article
Publication date: 14 January 2014

Gary Hunter

Abstract

Details

Sensor Review, vol. 34 no. 1
Type: Research Article
ISSN: 0260-2288

Keywords

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Article
Publication date: 12 July 2021

Yufei Chen, Hui Zhao, Yulong Liu and Hongyue CHU

Bismaleimide (BMI) is a kind of thermosetting resin and its application is usually limited by low toughness. In this paper, two kinds of reinforcement intercalator…

Abstract

Purpose

Bismaleimide (BMI) is a kind of thermosetting resin and its application is usually limited by low toughness. In this paper, two kinds of reinforcement intercalator amino-terminated polyoxypropylene (POP) and octadecyl trimethyl ammonium chloride (OTAC) were designed and synthesized to toughen BMI resin and the toughening effect was compared and analyzed. The purpose of this paper is to toughen BMI resin and analyze the toughening effect of two reinforcements intercalator amino-terminated polyoxypropylene (POP) and octadecyl trimethyl ammonium chloride (OTAC).

Design/methodology/approach

Sodium-based montmorillonite (Na-MMT) was modified by POP and OTAC, and the ion-exchange reaction obtained organic montmorillonite (POP-MMT and OTAC-MMT). The polymer matrix (MBAE) was synthesized, in which 4,4’-diamino diphenyl methane BMI was used as the monomer and 3,3’-diallyl bisphenol A and bisphenol A diallyl ether were used as active diluents. And then, POP-MMT/MBAE and OTAC-MMT/MBAE composites were prepared using MBAE as matrix and POP-MMT or OTAC-MMT as reinforcement. The Fourier-transform infrared, X-ray diffraction and scanning electron microscope (SEM) of the filler and microstructure and mechanical properties of the composite were characterized to the better reinforcement.

Findings

POP-MMT and OTAC-MMT enhanced BMI-cured products’ toughness by generating microcracks in the polymer to absorb more fracture energy. Meanwhile, POP-MMT and OTAC-MMT were the main stress components and the enhancement of the interface interaction was beneficial to transfer the external force from the matrix to the reinforcement and improved the mechanical properties of the composite. Furthermore, with the intercalation rate increasing, the compatibility of the two phases was increased and the performance of MBAE was also elevated.

Research limitations/implications

BMI is generally used as aerospace structural materials, functional materials, impregnating paint and other fields. However, high crosslinking density leads to moulding material’s brittleness and limits a wider range of applications. Therefore, it has become an urgent priority to explore and improve the mechanical properties of BMI resin.

Originality/value

POP and OTAC have successfully intercalated Na-MMT layers to get POP-MMT and OTAC-MMT, and the interplanar crystal spacing and the intercalation rate were calculated, respectively. The results were corresponding with the SEM images of POP-MMT and OTAC-MMT. After that, the morphology of composites illustrated the compatibility was related to the intercalation rate. According to the mechanism of modified MMT toughening epoxy resin, when they were dispersed uniformly in the matrix, the composite’s mechanical properties had been significantly improved. Additionally, OTAC-MMT with a higher intercalation rate had better compatibility and interfacial force with the matrix, so that the mechanical properties of OTAC-MMT/MBAE were the best.

Details

Pigment & Resin Technology, vol. ahead-of-print no. ahead-of-print
Type: Research Article
ISSN: 0369-9420

Keywords

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