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Article
Publication date: 1 August 1996

D. Filippini, L. Fraigi and S. Gwirc

The study of relevant geometrical parameters for the design andfabrication of thick film microchannels has been considered in this work. An analysis of geometricalbehaviour was…

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Abstract

The study of relevant geometrical parameters for the design and fabrication of thick film microchannels has been considered in this work. An analysis of geometrical behaviour was performed applying linear regression techniques. This procedure allows the design of structural elements (lateral walls) necessary for channels, predicting the final dimensions for original screen pattern design. A 100 μm wide and 15 μm high microchannel was constructed on the basis of the characteristics defined in the study.

Details

Microelectronics International, vol. 13 no. 2
Type: Research Article
ISSN: 1356-5362

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