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This paper aims to develop resonant vibratory gyroscopes for high sensitive detection. The dynamic characteristics of resonant vibratory gyroscopes are investigated.

Firstly, the working principle and the dynamic output characteristics of the resonant vibratory gyroscope could be described by the damped Mathieu equation. Moreover, an approximate analytical method based on the small parameter perturbation has been used for the purpose of investigating the approximate solution of the damped Mathieu equation. Finally, to verify the feasibility of the approximate analytical method of the damped Mathieu equation, dynamic output characteristics’ experiments of the resonant vibratory gyroscope are built.

The theoretical analysis and numerical simulations show that the approximate solution of the damped Mathieu equation is close to the dynamic output characteristics of the resonant vibratory gyroscope. On the other hand, it is concluded from the tested result that there exists a correlation between the theoretical curve and the experimental data processing result, meaning the damped dynamics analytical method is effective in building resonant vibratory gyroscopes.

This paper seeks to establish a foundation for optimizing and testing the performance of the resonant vibratory gyroscope. To this end, the approximate analytical method of the damped Mathieu equation was discussed. The result of this research has proved that the dynamic characteristics based on the damped Mathieu equation is an effective approach and is instructional in the practical resonant sensor design.

A high-precision gyroscope is an important tool for accurate positioning, and the amplitude stability and frequency tracking ability of the drive control system are important and necessary conditions to ensure the precision of micro-electro-mechanical systems (MEMS) gyroscopes. To improve the precision of MEMS gyroscopes, this paper proposes a method to improve the amplitude stability and frequency tracking ability of a drive control system.

A frequency tracking loop and an amplitude control loop are proposed to improve the frequency tracking ability and amplitude stability of the drive control system for a MEMS gyroscopes. The frequency tracking loop mainly includes a phase detector, a frequency detector and a loop filter. And, the amplitude control loop mainly includes an amplitude detector, a low-pass filter and an amplitude control module. The simulation studies on the frequency tracking loop, amplitude control loop and drive control system composed of these two loops are implemented. The corresponding digital drive control algorithm is realized by the Verilog hardware description language, which is downloaded to the application-specific integrated circuits (ASIC) platform to verify the performances of the proposed method.

The simulation experiments in Matlab/Simulink and tests on the ASIC platform verify that the designed drive control system can keep the amplitude stable and track the driving frequency in real time with high precision.

This study shows a way to design and realize a drive control system for MEMS gyroscopes to improve their tracking ability. It is helpful for improving the precision of MEMS gyroscopes.

This paper aims to present new technological approaches of manufacturing of micromechanical gyroscope ring-sensitive element based on the nanoporous anodic alumina instead of traditional silicon technology. Simulation and the operation analyses of such elements have been performed.

The design of gyroscope represents a sensitive element on a glass substrate; in the center of a ring, there is a permanent magnet in a steel box. The sensitive element is made of profiled nanoporous anodic alumina consisting of an octagonal frame which is connected to a ring in the center with eight N-shaped spokes. The technology of the sensitive element fabrication involves the electrochemical formation of nanoporous anodic alumina substrate given the thickness and porosity and its chemical etching on the element topology. The basic parameters and the operation principle of the nanoporous alumina-sensitive element have been defined by finite element simulation.

It is shown that the resonance frequencies of the sensitive element change as functions of the alumina porosity. The main parameters of the nanoporous alumina-sensitive element have been compared with parameters of a silicon-sensitive element. Calculations have shown that the mechanical deformations of the von Mises are approximately lower by two times in the nanoporous alumina-sensitive element.

High-precision angular rate measurement will be achieved by reducing mechanical and electrical noises practically to zero through careful designing of a ring magnetoelectric gyroscope

The ring resonator made of nanoporous anodic alumina will allow to increase the threshold of sensitivity and stability of micromechanical gyroscope characteristics owing to the high precision of geometric dimensions, the stability of the elastic properties and the quality factor.

The purpose of this paper is to provide an overview of the major reliability issues of microelectromechanical systems (MEMS) under mechanical and environmental loading conditions. Furthermore, a comprehensive study on the nonlinear behavior of silicon MEMS devices is presented and different aspects of this phenomenon are discussed.

Regarding the reliability investigations, the most important failure aspects affecting the proper operation of the MEMS components with focus on those caused by environmental and mechanical loads are reviewed. These studies include failures due to fatigue loads, mechanical vibration, mechanical shock, humidity, temperature and particulate contamination. In addition, the influence of squeeze film air damping on the dynamic response of MEMS devices is briefly discussed. A further subject of this paper is discussion of studies on the nonlinearity of silicon MEMS. For this purpose, after a description of the basic principles of nonlinearity, the consequences of nonlinear phenomena such as frequency shift, hysteresis and harmonic generation and their effects on the device performance are reviewed. Special attention is paid to the mode coupling effect between the resonant modes as a result of energy transfer because of the nonlinearity of silicon. For a better understanding of these effects, the nonlinear behavior of silicon is demonstrated by using the example of Si cantilever beams.

It is shown that environmental and mechanical loads can influence on proper operation of the MEMS components and lead to early fracture. In addition, it is demonstrated that nonlinearity modifies dynamic response and leads to new phenomena such as frequency shift and mode coupling. Finally, some ideas are given as possible future areas of research works.

This is a review paper and aimed to review the latest manuscripts published in the field of reliability and nonlinearity of the MEMS structures.

THE engine and propeller when installed in an airframe transmit various loads to the aircraft structure through the engine mounting. These can be grouped as follows:

Technological capabilities of manufacturing microelectromechanical system (MEMS) gyroscopes are still insufficient if compared to manufacturing high-efficient gyroscopes and accelerometers. This creates weaknesses in their mechanical structure and restrictions in the measurement accuracy, stability and reliability of MEMS gyroscopes and accelerometers. This paper aims to develop a new architectural solutions for optimization of MEMS gyroscopes and accelerometers and propose a multi-axis MEMS inertial module combining the functions of gyroscope and accelerometer.

The finite element modeling (FEM) and the modal analysis in FEM are used for sensing, drive and control electrode capacitances of the multi-axis MEMS inertial module with the proposed new architecture. The description is given to its step-by-step process of manufacturing. Algorithms are developed to detect its angular rates and linear acceleration along three Cartesian axes.

Experimental results are obtained for eigenfrequencies and capacitances of sensing, drive and control electrodes for 50 manufactured prototypes of the silicon electromechanical sensor (SES). For 42 SES prototypes, a good match is observed between the calculated and simulated capacitance values of comb electrodes. Thus, the mean-square deviation is not over 20 per cent. The maximum difference between the calculated and simulated eigenfrequencies in the drive channel of 11 SES prototypes is not over 3 per cent. The same difference is detected for eigenfrequencies in the first sensing channel of 17 SES prototypes.

This study shows a way to design and optimize the structure and theoretical background for the development of the MEMS inertial module combining the functions of gyroscope and accelerometer. The obtained results will improve and expand the manufacturing technology of MEMS gyroscopes and accelerometers.

The problem of hydrogen embrittlement has been approached in a less theoretical manner than in some previous investigations. Factors were considered which could be utilized to minimize embrittlement in processing especially with the higher strength steels which suiter mostly.

This paper aims to provide detailed information on the dynamic model and closed‐loop control theory for a resonant accelerometer based on electrostatic stiffness, which is important for the design of this type of resonant accelerometer.

After analysing the principles of the resonant accelerometer based on electrostatic stiffness, a dynamic model was built. According to the requirements of the closed‐loop control, the control equations based on phase‐locked technology were also built for the system. With the help of the averaging method, the system behaviour was analysed, and the equilibrium for the vibration amplitude was achieved.

The theoretical analysis and simulation show that integral gain is critical to system stability. When it is larger than the critical point, the system stable time is shorter, but the frequency‐tracking process fluctuates; if it is smaller than the critical point, the system stable time is longer, and the frequency‐tracking process stabilizes a resonant accelerometer was fabricated with a bulk‐silicon‐dissolved process. With the above conclusions, the accelerometer was driven and tested with a sensitivity of 47 Hz/g for a single vibration beam.

The dynamic model and the control theory for the resonant accelerometer based on electrostatic stiffness were presented in this paper. The simulation and experiment results agree well with the theoretical analysis.

The purpose of this paper is to design a low-cost stress bimorph RF-MEMS switch which is the desired transmission area application.

The bimorph structure of the low-temperature plasma-enhanced chemical vapor deposition (PECVD) of thermal oxide and gold are utilized to create the vibrating membrane. The effects of process conditions of low-temperature oxide deposited using the PECVD technique enable stress-free deposition of the key structural layer.

Scanning electron microscope images of the RF micro-switch confirms negligible stress in the released structure. The RF performances of this device exhibit isolation around 43 dB of up to 50 GHz in the OFF-state position and an insertion loss of less than 0.18 dB in the ON-state.

The finite element method results show good isolation of 43 dB and less insertion loss of 0.18 dB.

THE importance of military research and development gained early recognition during the Second World War with the impact of such developments as radar, the atom bomb, the proximity fuse, the V‐2 rocket, and jet propulsion. During the post‐war years, however, a vital significance was attached to research and development as the only means by which to attain the technical superiority needed to offset the preponderances of manpower available to this country's major potential enemy.