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This paper aims to report a stretchable piezoresistive strain sensor array that can detect various static and dynamic stimuli, including bending, normal force, shear stress and certain range of temperature variation, through sandwiching an array of conductive blocks, made of multiwalled carbon nanotubes (MWCNTs) and polydimethylsiloxane (PDMS) composite. The strain sensor array induces localized resistance changes at different external mechanical forces, which can be potentially implemented as electronic skin.

The working principle is the piezoresistivity of the strain sensor array is based on the tunnelling resistance connection between the fillers and reformation of the percolating path when the PDMS and MWCNT composite deforms. When an external compression stimulus is exerted, the MWCNT inter-filler distance at the conductive block array reduces, resulting in the reduction of the resistance. The resistance between the conductive blocks in the array, on the other hand, increases when the strain sensor is exposed to an external stretching force. The methodology was as follows: Numerical simulation has been performed to study the pressure distribution across the sensor. This method applies two thin layers of conductive elastomer composite across a 2 × 3 conductive block array, where the former is to detect the stretchable force, whereas the latter is to detect the compression force. The fabrication of the strain sensor consists of two main stages: fabricating the conducting block array (detect compression force) and depositing two thin conductive layers (detect stretchable force).

Characterizations have been performed at the sensor pressure response: static and dynamic configuration, strain sensing and temperature sensing. Both pressure and strain sensing are studied in terms of the temporal response. The temporal response shows rapid resistance changes and returns to its original value after the external load is removed. The electrical conductivity of the prototype correlates to the temperature by showing negative temperature coefficient material behaviour with the sensitivity of −0.105 MΩ/°C.

The conductive sensor array can potentially be implemented as electronic skin due to its reaction with mechanical stimuli: compression and stretchable pressure force, strain sensing and temperature sensing.

This prototype enables various static and dynamic stimulus detections, including bending, normal force, shear stress and certain range of temperature variation, through sandwiching an array of conductive blocks, made of MWCNT and PDMS composite. Conventional design might need to integrate different microfeatures to perform the similar task, especially for dynamic force sensing.

The purpose of this paper is to introduce a new tactile array sensor into the medical field to enhance current robotic minimally invasive surgery (RMIS) procedures that are still limited in scope and versatility. In this paper, a novel idea is proposed in which a tactile sensor array can measure rate of displacement in addition to force and displacement of any viscoelastic material during the course of a single touch. To verify this new array sensor, several experiments were conducted on a diversity of tissues from which it was concluded that this newly developed sensory offers definite and significant enhancements.

The proposed array sensor is capable of extracting force, displacement and displacement rate in the course of a single touch on tissues. Several experiments have been conducted on different tissues and the array sensor to verify the concept and to verify the output of the sensor.

It is shown that this new generation of sensors are required to distinguish the difference in hardness degrees of materials with viscoelastic behavior.

In this paper, a new generation of tactile sensors is proposed that is capable of measuring indentation time in addition to force and displacement. This idea is completely unique and has not been submitted to any conference or journal.

The purpose of this paper is to provide an improved structural design for accelerometers based on cantilever beam‐mass structure and offer the descriptions of sensor fabrication, packaging and experiments.

The cantilever beam‐membrane (CB‐membrane) structure is designed as the sensing element for piezoresistive accelerometers. In the CB‐membrane structure, a cantilever beam and two identical membranes as a whole part supports the proof mass. Four piezoresistors are distributed on the surface of the cantilever beam to form a Wheatstone bridge. Finite element method is used to carry out the structural analysis and determine the sensor dimensions. The sensor chip is fabricated by bulk micro‐machining technique, packaged in dual‐in‐line (DIP) way and tested.

Compared with the conventional cantilever beam‐mass (CB‐mass) structure, the CB‐membrane structure can improve the sensor's performances, including response frequency, output linearity and cross‐axis sensitivity. The results of simulation and experiments prove that the CB‐membrane accelerometer has good performances.

The accelerometer is simply packaged and the zero offset voltage has not been compensated. Moreover, the measured response frequency is lower than the simulated value. Further work and study are needed to solve these problems.

The accelerometer with CB‐membrane structure has good performances as the static and dynamic experiments show and is suitable to detect the spindle vibration of the machine tools.

The flexibly thin film grid pressure sensor is mainly used to detect the interface pressure distribution between touching objects. Aim at larger measurement error, the strip double sensing layer pressure sensor are designed and fabricated and tested.

Defects and characteristic of the flexibly thin film grid pressure sensor based on piezoresistive effect are analyzed and pointed out in this paper. After comparison of four sensors, the strip double sensing layer pressure sensor was thought to be best.

Experiment shows that the strip double sensing layer pressure sensor could eliminate the measurement error basically and illustrates the validity of measuring the interface pressure distribution between area touching objects.

In this paper, only the strip double sensing layer pressure sensor was used to verify the validity of measuring the static interface pressure distribution between peach and platform. But there also exists some problems such as the adhering reliability of electrode and the unevenness of sensing layer. These problems could be overcome in the future research if the fabricating procedure and ingredient of material could be adjusted correctly.

The strip double sensing layer pressure sensor could be applied to detect the static interface pressure distribution such as peach pressure distribution. For dynamic measurement, this research needs to be done further.

Strip double sensing layer pressure sensor with simple “interlayer” structure and with low manufacture cost is presented to basically eliminate the measurement error of interface pressure distribution of original sensor.

The purpose of this paper is to use finite element method for optimizing the membrane type double cavity vacuum sealed structure for the best achievable sensitivity in a piezoresistive absolute pressure sensor and its validation using a standard complementary metal oxide semiconductor (CMOS) process.

A double cavity vacuum sealed piezoresistive absolute pressure sensor has been simulated and optimized for its performance and an analytical model describing the behaviour of the sensor has been described. The 1×1 mm sensor chip has two membrane type 100×30×1.7 μm diaphragms consisting of composite layers of plasma enhanced chemical vapour deposition (PECVD) of silicon nitride (Si₃N₄) and silicon dioxide (SiO₂) each hanging over 21 μm deep rectangular cavity. Potassium hydroxide (KOH) based anisotropic etching of single crystal silicon using front side lateral etching technology is used for the fabrication of the sensor. The electrical readout circuitry uses 318 Ω boron diffused low pressure vapour chemical vapour deposition (LPCVD) of polysilicon resistors arranged in the Wheatstone half bridge configuration. The sensing structure is simulated and optimized using COMSOL Multiphysics.

Front-side lateral etching technology has been successfully used for the fabrication of double cavity absolute pressure sensor. A good agreement with the fabricated device for the chosen location of the piezoresistors through simulation has been predicted. The measured pressure sensitivity of two tested pressure sensors is 12.63 and 12.46 mV/MPa, and simulated pressure sensitivity is found to be 12.9 mV/MPa for pressure range of 0 to 0.5 MPa. The location of the piezoresistor has also been optimized using the simulation tools for enhancing the sensor sensitivity to 62.14 mV/MPa. The pressure sensitivity is further enhanced to 92 mV/MPa by increasing the width of the diaphragm to 35 μm.

The simulated and measured pressure sensitivities of the double cavity pressure sensor are in close agreement. Sevenfold enhancement in the pressure sensitivity of the optimized sensing structure has been observed. The proposed front-side lateral etching technology can be adopted for making membrane type diaphragms hanging over vacuum sealed micro-cavities for high sensitivity pressure sensing applications.

The purpose of this paper is proposed a new structure design for high performance accelerometer.

An improved sensitivity structure considering sensitivity, natural frequency and cross-axis sensitivity is established and realized. The proposed structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer and eliminate the lateral sensitivity effect by the specific configuration, which is made possible by incorporating slots into the eight-beam structure. The mechanical model and its mathematical solution are established for calculating the sensitivity and natural frequency behavior of the designed structure. The developed sensor is fabricated on the n-type single-crystal silicon wafer and packaged for experiment. The accelerometer prototype was tested in the centrifugal machine and dynamic calibration system.

The experimental results show that the sensitivity of the designed sensor is 0.213 mV/(Vg) and the natural frequency of the sensor is 14.22 kHz. Compared with some piezoresistive accelerometers in literatures, the designed sensor possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in measuring high frequency vibration signals.

The accelerometer with slotted eight-beam structure shows a good performance in the static and dynamic experiments and can be used in measuring high frequency vibration signals.

This paper aims to provide a focused review on the geometrical designs for performance enhancement of piezoresistive microaccelerometers.

By analyzing working principle and conventional geometries, the improved research proposals are sorted into three groups in terms of their anticipated objectives, including sensitivity, resonant frequency and cross-axis sensitivity. Accessible methods are outlined and their merits and demerits are described.

Novel geometries obviously enhance the performance of accelerometers, and the efficacy can be further elevated by newer materials and fabrication processes.

This paper mainly focused on the improved geometrical designs for sensitivity, resonant frequency and cross-axis sensitivity. Other performance parameters or design schemes are not included in this paper.

This paper generalizes the available geometries and methods for the enhancement of sensitivity, resonant frequency and cross-axis sensitivity in piezoresistive accelerometers design.

The purpose of this study is to present a highly stretchable and flexible strain sensor with simple and low cost of fabrication process and excellent dynamic characteristics, which make it suitable for human motion monitoring under large strain and high frequency.

The strain sensor was fabricated using the rubber/latex polymer as elastic carrier and single-walled carbon nanotubes (SWCNTs)/carbon black (CB) as a synergistic conductive network. The rubber/latex polymer was pre-treated in naphtha and then soaked in SWCNTs/CB/silicon rubber composite solution. The strain sensing and other performance of the sensor were measured and human motion tracking applications were tried.

These strain sensors based on aforementioned materials display high stretchability (500 per cent), excellent flexibility, fast response (approximately 45 ms), low creep (3.1 per cent at 100 per cent strain), temperature and humidity independence, superior stability and reproducibility during approximately 5,000 stretch/release cycles. Furthermore, the authors used these composites as human motion sensors, effectively monitoring joint motion, indicating that the stretchable strain sensor based on the rubber/latex polymer and the synergetic effects of mixed SWCNTs and CB could have promising applications in flexible and wearable devices for human motion tracking.

This paper presents a low-cost and a new type of strain sensor with excellent performance that can open up new fields of applications in flexible, stretchable and wearable electronics, especially in human motion tracking applications where very large strain should be accommodated by the strain sensor.

Carbon nanotube (CNT) thread ' s piezoresisitive strain sensing properties of gauge factor, linearity, hysteresis, consistency, temperature stability, and bandwidth were evaluated. This evaluation was motivated by little information in literature combined with the need to understand these properties for commercial use. The paper aims to discuss these issues.

The study here analyzes as-spun CNT thread built into unidirectional glass fiber composites and mounted onto aluminium beams with epoxy to evaluate strain sensing properties. The analyses utilize known sensor parameter definitions to quantify sensor performance.

CNT thread can provide reliable and robust strain measurements for composite and metallic structures. The strain sensor performance meets or exceeds other strain sensors in performance.

CNT thread ' s piezoresistive effect is not well understood in terms of Poisson ' s ratio and nanotube contact. More research needs to be carried out to better understand this relationship and optimize the sensor thread.

CNT thread can be utilized as a robust strain sensor for composite and metallic structures. It can also be built into composite materials for embedded strain and damage monitoring. By monitoring composite materials with the sensor thread, reliability will significantly increase. In turn, this will lower safety factors and revolutionize inspection methods for composite materials.

This paper is the first to comprehensively evaluate key strain sensing properties of CNT thread. With all this strain sensor information in one spot, this should help expedite the use of this technology in other research and industry.

The mainstream of current research work in array tactile sensors concentrates on using a soft compliant membrane as a means of transmitting the effect of variable external stimuli to the discrete sensing elements. The soft compliant devices are usually made of a thin flexible substrate such as pressure sensitive pads, conductive materials, conductive coatings, piezoelectric polymers or elastomers. A large number of tactile sensor designs using these types of materials have been investigated by researchers. These include the use of anisotropically conductive silicone rubber (ACS), sponges containing carbon particles or felted carbon fibres, piezoelectric polymers such as polyvinylidene fluoride (PVF2) and conductive elastomers such as Dynacom materials consisting of silicone rubber mixed with metallic compounds.