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Article
Publication date: 3 January 2017

Peyman Rafiee, Golta Khatibi and Michael Zehetbauer

The purpose of this paper is to provide an overview of the major reliability issues of microelectromechanical systems (MEMS) under mechanical and environmental loading conditions…

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Abstract

Purpose

The purpose of this paper is to provide an overview of the major reliability issues of microelectromechanical systems (MEMS) under mechanical and environmental loading conditions. Furthermore, a comprehensive study on the nonlinear behavior of silicon MEMS devices is presented and different aspects of this phenomenon are discussed.

Design/methodology/approach

Regarding the reliability investigations, the most important failure aspects affecting the proper operation of the MEMS components with focus on those caused by environmental and mechanical loads are reviewed. These studies include failures due to fatigue loads, mechanical vibration, mechanical shock, humidity, temperature and particulate contamination. In addition, the influence of squeeze film air damping on the dynamic response of MEMS devices is briefly discussed. A further subject of this paper is discussion of studies on the nonlinearity of silicon MEMS. For this purpose, after a description of the basic principles of nonlinearity, the consequences of nonlinear phenomena such as frequency shift, hysteresis and harmonic generation and their effects on the device performance are reviewed. Special attention is paid to the mode coupling effect between the resonant modes as a result of energy transfer because of the nonlinearity of silicon. For a better understanding of these effects, the nonlinear behavior of silicon is demonstrated by using the example of Si cantilever beams.

Findings

It is shown that environmental and mechanical loads can influence on proper operation of the MEMS components and lead to early fracture. In addition, it is demonstrated that nonlinearity modifies dynamic response and leads to new phenomena such as frequency shift and mode coupling. Finally, some ideas are given as possible future areas of research works.

Originality/value

This is a review paper and aimed to review the latest manuscripts published in the field of reliability and nonlinearity of the MEMS structures.

Details

Microelectronics International, vol. 34 no. 1
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 3 May 2016

Peyman Rafiee, Golta Khatibi and Francesco Solazzi

The purpose of this study is to address the nonlinear oscillations of single-crystal silicon micro-electromechanical systems (MEMS) accelerometers subjected to mechanical…

Abstract

Purpose

The purpose of this study is to address the nonlinear oscillations of single-crystal silicon micro-electromechanical systems (MEMS) accelerometers subjected to mechanical excitation.

Methodology/approach

The nonlinear behavior was detected and analyzed by using experimental, analytical and numerical approaches. Piezoelectric shaker as a source of mechanical excitation and differential laser Doppler vibrometer in combination with a micro system analyzer were used in the experimental effort. Two types of devices considered included nonencapsulated samples and samples encapsulated in nitrogen gas compressed between two glasses. Numerical and analytical investigations were conducted to analyze the nonlinear response. A novel method has been suggested to calculate the nonlinear parameters. The obtained experimental, numerical and analytical results are in good agreement.

Findings

It has been found that the nonlinearity leads to a shift in frequencies and generates higher harmonics, but, most importantly, reveals new phenomena, such as the jump and instability of the vibration amplitudes and phases.

Originality/value

It has been shown that under the constant excitation force, the MEMS device can work in both linear and nonlinear regions. The role of the beat phenomenon has been also addressed and discussed. It has been found that the attributes of the nonlinear response are strongly dependent on the level and duration of the excitation. It is concluded that the nonlinear response of the systems is strongly dependent on the level of the excitation energy. It has been also concluded that larger quality factors are able to enhance dramatically the nonlinear effects and vice versa.

Details

Microelectronics International, vol. 33 no. 2
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 7 December 2022

Peyman Jafary, Davood Shojaei, Abbas Rajabifard and Tuan Ngo

Building information modeling (BIM) is a striking development in the architecture, engineering and construction (AEC) industry, which provides in-depth information on different…

Abstract

Purpose

Building information modeling (BIM) is a striking development in the architecture, engineering and construction (AEC) industry, which provides in-depth information on different stages of the building lifecycle. Real estate valuation, as a fully interconnected field with the AEC industry, can benefit from 3D technical achievements in BIM technologies. Some studies have attempted to use BIM for real estate valuation procedures. However, there is still a limited understanding of appropriate mechanisms to utilize BIM for valuation purposes and the consequent impact that BIM can have on decreasing the existing uncertainties in the valuation methods. Therefore, the paper aims to analyze the literature on BIM for real estate valuation practices.

Design/methodology/approach

This paper presents a systematic review to analyze existing utilizations of BIM for real estate valuation practices, discovers the challenges, limitations and gaps of the current applications and presents potential domains for future investigations. Research was conducted on the Web of Science, Scopus and Google Scholar databases to find relevant references that could contribute to the study. A total of 52 publications including journal papers, conference papers and proceedings, book chapters and PhD and master's theses were identified and thoroughly reviewed. There was no limitation on the starting date of research, but the end date was May 2022.

Findings

Four domains of application have been identified: (1) developing machine learning-based valuation models using the variables that could directly be captured through BIM and industry foundation classes (IFC) data instances of building objects and their attributes; (2) evaluating the capacity of 3D factors extractable from BIM and 3D GIS in increasing the accuracy of existing valuation models; (3) employing BIM for accurate estimation of components of cost approach-based valuation practices; and (4) extraction of useful visual features for real estate valuation from BIM representations instead of 2D images through deep learning and computer vision.

Originality/value

This paper contributes to research efforts on utilization of 3D modeling in real estate valuation practices. In this regard, this paper presents a broad overview of the current applications of BIM for valuation procedures and provides potential ways forward for future investigations.

Details

Engineering, Construction and Architectural Management, vol. 31 no. 4
Type: Research Article
ISSN: 0969-9988

Keywords

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