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This paper aims to present wireless passive temperature sensors by using high-temperature stable polymer-derived silicoaluminum carbonitride (PDC-SiAlCN) ceramic materials.

In this paper, a novel PDC-SiAlCN ceramic was synthesized by using polyvinylsilazne and aluminum-tri-sec-butoxide as precursors. Then, PDC-SiAlCN was used as the sensing material to fabricate sensors. The sensors are based on a cavity resonator and an integrated slot antenna. The resonant frequencies of the sensors are determined by the dielectric constants of PDC-SiAlCN ceramic, which monotonically increase versus temperature.

The effect of sensor dimension on the performance of the sensors was investigated using simulation and experimental methods. The using temperature, reliability and sensing distance of the sensors were studied experimentally. The sensors performed measurement up to 1100°C with excellent reliability and repeatability. The sensing distance varied from 38 to 14 mm when the temperature increasing from 20°C to 1100°C.

PDC-SiAlCN ceramic based wireless passive temperature sensors have the advantage of seamless integration of slot antennas and resonators, which greatly reduces the size of the sensor, reduces the direction of antenna transmission and increases the transmission space. The sensors can be used for many harsh environment applications such as engine monitoring.