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Article
Publication date: 1 April 1998

Jo Lernout

A novel technology for a multichip module (MCM) on silicon is presented. The technology features the integration of a power and a ground plane, resulting in a five‐conductor layer…

231

Abstract

A novel technology for a multichip module (MCM) on silicon is presented. The technology features the integration of a power and a ground plane, resulting in a five‐conductor layer module, the use of the heavily (n+) doped Si as the ground plane for integrated decoupling capacitances, integrated low TCR NiCr resistors, low resistance (13mΩ per square) TiW/Cu/TiW metallisation, high quality PECVD oxynitride (SiON) insulation layers, which are optimised to a low stress content, and a new wet‐dry etch technique for the vias. The module is able to handle 200MHz clock frequencies and, when carefully designed, can also be used for opto‐electronic interconnections in the GHz range. A test module for DC and HF characterisation has been designed and produced. Preliminary test results are presented.

Details

Microelectronics International, vol. 15 no. 1
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 5 March 2020

Piotr Firek, Jakub Szarafiński, Grzegorz Głuszko and Jan Szmidt

The purpose of this study is to directly measure and determine the Si/SiO2/AlOxNy interface state density on metal insulator semiconductor field effect transistor (MISFET…

Abstract

Purpose

The purpose of this study is to directly measure and determine the Si/SiO2/AlOxNy interface state density on metal insulator semiconductor field effect transistor (MISFET) structures. The primary advantage of using aluminum oxynitride (AlOxNy) is the perfectly controlled variability of the properties of these layers depending on their stoichiometry, which can be easily controlled by the parameters of the magnetron sputtering process. Therefore, a continuous spectrum of properties can be achieved from the specific values for oxide to the specific ones for nitride, thus opening a wide range of applications in high power, high temperature and high frequency electronics, optics and sensors and even acoustic devices.

Design/methodology/approach

The basic subject of this study is n-channel transistors manufactured using silicon with 50-nm-thick AlOxNy films deposited on a silicon dioxide buffer layer via magnetron sputtering in which the gate dielectric was etched with wet solutions and/or dry plasma mixtures. Furthermore, the output, transfer and charge pumping (CP) characteristics were measured and compared for all modifications of the etching process.

Findings

An electrical measurement of MISFETs with AlOxNy gate dielectrics was conducted to plot the current-voltage and CP characteristics and examine the influence of the etching method on MISFET parameters.

Originality/value

In this report, a flat band and threshold voltage and the density of interface traps were determined to evaluate and improve an AlOxNy-based MISFET performance toward highly sensitive field effect transistors for hydrogen detection by applying a Pd-based nanocrystalline layer. The sensitivity of the detectors was highly correlated with the quality of the etching process of the gate dielectrics.

Details

Microelectronics International, vol. 37 no. 2
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 1 March 1989

M.G. Norton

Aluminium nitride (AlN) is currently under investigation as a substrate material for use in microcircuit applications in particular where high thermal conductivity is required…

Abstract

Aluminium nitride (AlN) is currently under investigation as a substrate material for use in microcircuit applications in particular where high thermal conductivity is required. Three commercially available substrate materials have been characterised using scanning electron microscopy (SEM), transmission electron microscopy (TEM) and X‐ray diffraction (XRD). The differences in thermal conductivity between the materials and also the difference from the theoretical thermal conductivity have been correlated to the presence of low thermal conductivity second phase regions between grains, defects within the crystal structure, the presence of oxygen impurities and poor sintering behaviour. The highest thermal conductivity substrate obtainable during this study was 140 W7m K. The substrates were identified as comprising hexagonal AIM having a wurtzite type structure. In addition, oxide and oxynitride phases were detected. The surface morphology of the substrates was also investigated, as it is the nature of the surface that will be of importance in determining the adhesion of applied films.

Details

Microelectronics International, vol. 6 no. 3
Type: Research Article
ISSN: 1356-5362

Content available
Article
Publication date: 25 July 2008

John Wolstenholme

177

Abstract

Details

Microelectronics International, vol. 25 no. 3
Type: Research Article
ISSN: 1356-5362

Content available
Article
Publication date: 1 April 2002

58

Abstract

Details

Microelectronics International, vol. 19 no. 1
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 22 November 2023

Khishn Kumar Kandiah, Vengadaesvaran Balakrishnan, Amirul Syafiq, Nasrudin Abd Rahim, Adarsh Kumar Pandey, Yee Seng Tan, Sanjay J Dhoble, Ramesh Kasi and Ramesh Subramaniam

There is a strong inducement to develop new inorganic materials to substitute the current industrial pigments, which are known for their poor ultraviolet absorbent and low…

Abstract

Purpose

There is a strong inducement to develop new inorganic materials to substitute the current industrial pigments, which are known for their poor ultraviolet absorbent and low photoluminescence (PL) properties. The purpose of this paper is to invent a better rare-earth-based pigment material as a spectral modifier with good luminescence properties to enhance the spectral response for photovoltaic panel application.

Design/methodology/approach

Different phosphor samples made of nano-calcium carbonate (CaCO3) with varied wt.% of the dopant Dysprosium doped calcium borophosphate (CBP/Dy) as (W0 – 0%, W1 – 3,85%, W2 – 7.41%, W3 –10.71% and W4 –13.79%) were prepared via the solid-state diffusion method at 600 °C for 6 h using a muffle furnace. The structural, morphological and luminescence properties of the CaCO3:CBP/Dy powder samples were examined using scanning electron microscopy (SEM), X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR) and PL test.

Findings

The XRD, SEM and FTIR results verified the crystalline formation, morphological behaviour and vibration bonds of synthesized CBP/Dy-doped CaCO3 powder samples. XRD pattern revealed that the synthesized powder samples exhibit crystalline structured materials, and SEM results showed irregular shape and porous-like structured morphologies. FTIR spectrum shows prominent bands at 712, 874 and 1,404 cm−1, corresponding to asymmetric stretching vibrations of CO32− groups and out-of-plane bending. PL characterization of CBP/Dy-doped CaCO3 (sample W) shows emission at 427 nm (λmax) under the excitation of 358 nm. The intensity of PL emission spectra drops due to the concentration quenching effect, while the maximum PL intensity is observed in the W3 phosphor powder system.

Research limitations/implications

This phosphor powder is expected to find out the potential application such as a spectral modifier which is applied to match the energy of photons with solar cell bandgap to improve spectral absorption and lead to better efficiency.

Originality/value

The introduction of a nano-CaCO3:CBP/Dy hybrid powder system with good luminescence properties to be used as spectral modifiers for solar cell application has been synthesized in the lab, which is a novel attempt.

Details

Pigment & Resin Technology, vol. ahead-of-print no. ahead-of-print
Type: Research Article
ISSN: 0369-9420

Keywords

Content available
Article
Publication date: 11 May 2010

56

Abstract

Details

Microelectronics International, vol. 27 no. 2
Type: Research Article
ISSN: 1356-5362

Article
Publication date: 1 January 1986

After many very successful years as a researcher and manager at British Telecommunications Research Laboratories, Nihal Sinnadurai has moved over to consultancy with BPA…

Abstract

After many very successful years as a researcher and manager at British Telecommunications Research Laboratories, Nihal Sinnadurai has moved over to consultancy with BPA (Technology & Management) Ltd.

Details

Microelectronics International, vol. 3 no. 1
Type: Research Article
ISSN: 1356-5362

Article
Publication date: 11 October 2022

Mazwan Mansor, Syamsul M., Yusnizam Yusuf and Mohd Nazri Abdul Rahman

This study aims to present a numerical study of atomic structure for aluminium nitride (AlN) when the crystal was assumed grown on different orientation of sapphire substrate. The…

Abstract

Purpose

This study aims to present a numerical study of atomic structure for aluminium nitride (AlN) when the crystal was assumed grown on different orientation of sapphire substrate. The change of the AlN atomic structure with sapphire orientation was associated to the interface between the AlN and the sapphire. The results from this study would provide a guideline in selecting suitable orientation of sapphire for obtaining desirable AlN crystals, in particular, for reducing threading dislocation density in the AlN/sapphire templates for developing UV LEDs.

Design/methodology/approach

The approach of atomic structure by visualization for electronic and structural analysis numerical method to develop shape of atomic geometry to evaluate which plane are more suitable for the AlGaN technology UV-LED based.

Findings

The calculation based on ratio on first and second layers can be done by introduction of lattice constant.

Research limitations/implications

With plane’s color of cutting plane on bulky materials, all the shape looks the same.

Practical implications

By implementing this method, the authors can save time to find the most suitable plane on the growth structure.

Originality/value

All authors of this research paper have directly participated in the planning, execution or analysis of the study; all authors of this paper have read and approved the final version submitted; the contents of this manuscript have not been copyrighted or published previously; the contents of this manuscript are not now under consideration for publication elsewhere; the contents of this manuscript will not be copyrighted, submitted or published elsewhere, whereas acceptance by the journal is under consideration.

Details

Microelectronics International, vol. 40 no. 1
Type: Research Article
ISSN: 1356-5362

Keywords

Article
Publication date: 1 June 1998

T. Sundararajan, S. Rajeswari, M. Subbaiyan, U. Kamachi Mudali and K.G.M. Nair

Nitrogen ion implantation on a Ti6Al4V alloy with 70KeV energy was carried out at different doses ranging from 5 × 1015 to 2.5 × 1017ions/cm2. The implanted samples were subjected…

372

Abstract

Nitrogen ion implantation on a Ti6Al4V alloy with 70KeV energy was carried out at different doses ranging from 5 × 1015 to 2.5 × 1017ions/cm2. The implanted samples were subjected to open circuit potential/time measurement and cyclic polarization studies to evolve the optimum dose which can give good corrosion resistance in a simulated body fluid condition. The results show that there was an increase in corrosion resistance with increased doses up to 7 × 1016ions/cm2, beyond which it started to decrease. The stability of the passive film at a higher potential was assessed by potentiotransient techniques after impressing a constant potential of 1.5V for three hours. The results of the investigation indicate that nitrogen ion implantation can be used as a viable method to improve the corrosion resistance of orthopaedic implant devices made of Ti6Al4V alloy. The nature of the stable passive film and its influence on corrosion resistance are discussed in this paper.

Details

Anti-Corrosion Methods and Materials, vol. 45 no. 3
Type: Research Article
ISSN: 0003-5599

Keywords

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