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This paper aims to focus on the hybrid numerical method for effective design of silicon micromotor.

In this work, the authors introduced finite element methods combined with LUA and Matlab. The paper focuses on analysis of electrostatic micromotor and uses computer simulation procedure leading to new structure design.

This strategy enables changing of all parameters of the micromotors MEMS. Moreover, this strategy allows for taking advantage of FEM, namely possibility of calculations of complicated geometries (different electromagnetic devices too) without additional operations.

A novel strategy in computer modeling of micromotor MEMS, based on the fast and very efficient hybrid method for analysis and design, is proposed.

Historically, the idea of using electrostatic phenomena to produce motion has long stimulated the activity of scientists. Although the power generated by electrostatic motors is modest, the absence of windings and ferromagnetic material makes this kind of device competitive for applications characterized by low levels of torque and reduced volumes. During last years a renewed attention appeared towards electrostatic devices in the microscopic scale; their fabrication has been possible thanks to the technology for Si‐integrated‐circuits. In particular, electrostatic micromotors have an increasing role as position actuators when submillimetric movements are required. Methodologies of numerical simulation applied to microdevices are a helpful tool for the designer, who should fulfil criteria often in mutual clash like electromechanical response and fabrication cost. More generally, procedures of automated optimal design are now available, tackling the design problem as the constrained minimization of an objective function suitably set up.

This paper presents the results of silicon micromotor static and dynamic simulations by means of finite element method and the Moulton‐Adams algorithm as well. Capacitance and torque curves calculation. The virtual work principle has been applied. The dynamic states of the motor are described by the non‐linear and non‐stationary system of ordinary difference equations solved numerically. Some results of computer simulation of dynamic states are presented and discussed.

This paper intends to lay a background knowledge towards the feasibility of developing a bottom-drive variable capacitance micromotor (VCM) using a surface micromachining process (SMP). The purpose of this paper is to determine the possibility of neglecting the bending of the rotor plates caused by the electrostatic normal forces when deploying a set of mechanical supports.

A multiphysics simulation approach is considered in order to analyse the coupled electromechanical effects in a steady state and to evaluate if the proposed geometries are useful to reduce the bending of the plates.

A surfaced micromachined bottom-drive VCM requires mechanical reinforcement in order to eliminate the risk of an electrical short circuit caused by the deformation in the rotor plates. The combination of an external supporting ring and anchored structural ribs on top of the rotor poles is sufficient to neglect the deformation in the poles of the rotor.

An original analysis with the objective of setting a background in the development of a bottom-drive electrostatic micromotor using a SMP is presented.

The paper seeks to present a methodology using the numerical Schwarz‐Christoffel (SC) transformation in order to extract a subdomain from a simply‐connected source‐free two‐dimensional field domain. The aims to present an application to the design of an electrostatic micromotor.

The methodology can be usefully applied to reduce the size of complicated field regions with irregularly shaped boundaries. In the subdomain, finite‐element (FEM) analyses can then be performed with limited computational effort.

The synthesis of the conditions along the sub‐domain boundary, which is piecewise approximated by potential and flux lines, is carried out by performing repeated field analyses. Several comparisons among FEM and SC results are presented, to validate the proposed approach.

Refined techniques of conformal mapping are used in order to extract a suitable subdomain from a large field domain of an electrostatic micromotor. This allows one to focus the analysis directly on the region where the field distribution is to be investigated.

This paper sets out to provide a numerical procedure for field analysis and shape design for a class of MEMS devices.

The proposed numerical procedure for field analysis relies on numerical inversion of Schwarz‐Christoffel (SC) transformations for doubly‐connected regions: the geometry of a given micromotor is mapped into an annulus, where the non‐radial field excited by the transformed electrodes is computed. In turn, the shape design relies on the definition of non‐dominated solution according to the Pareto optimality conditions.

The SC approach proposed here allows the designer to evaluate both driving torque and radial force characteristics of the device with suitable accuracy within short CPU times. In turn, this allows one to perform repeated field analyses for a large number of feasible geometries and to use enumerative approaches to design optimization. By this means, a 3D objective space is investigated to identify the optimal shape of an electrostatic micromotor, subject to prescribed constraints.

To the best of one's knowledge, the combination of SC transformations and Pareto optimality is an unprecedented method for MEMS design. In particular, it is expected that the proposed SC tools will supply a fast and accurate computation to compare or supplement results from FEM tools, when a large number of geometries should be analysed. This could be particularly useful in the preliminary steps of a design procedure for a given class of devices.

The purpose of this paper is to show the evolution of microsystems together with modeling methods in the space of dozen years as a result of finished research in the frame of several projects.

In this paper several approaches are presented. First, microsystems were built in multi project wafer technology. They were demonstrators like micromotor, micromirrors or micropumps modeled using dedicated design tool. A multi purpose chip was also designed using HDL description and FEM simulations. The next project concerned chemical sensors, where specialized models were developed and implemented in VHDL‐AMS in order to perform multidomain behavioral simulations. Dedicated tools were also developed for medical applications.

The evolution of MEMS technology is strictly connected with simulation and modeling methods. The success and short time to market need fast and accurate simulation methods. This paper shows that the approach depends on application. Moreover, it is connected with the access to the technology.

This paper presents a brief overview on projects performed in DMCS‐TUL department. It shows the evolution of modeling methods and technology used in developing and fabrication of microsystems for various applications.

Drawing on the events of two recent motor and actuator technology conferences, reports a renewed interest in electromagnetic products. Looks, in particular, at the flat transformer which, unlike the square transformer, overcomes problems of heat generation and dissipation. Discusses the recent developments of the electrostatic micromotor and the many applications which exist for motors of this size, for instance in micro‐robots and micro‐grippers, and other new ideas such as the adhesive micro‐gripper, the piezo‐electric actuator, different shape memory alloy (SMA) profiles and applications, including a miniature inspection robot and exploitation of SMA’s superelastic qualities.

The new developments in silicon Hall sensors are highlighted. First, basic components made by microelectronic technology are explained. They lead to the development of high accuracy vectorial magnetic probes. Then examples of new applications like angular position sensor and current measurements are illustrated. Finally, new concepts in order to increase the detectivity using magnetic chopping are demonstrated.

Introduces papers from this area of expertise from the ISEF 1999 Proceedings. States the goal herein is one of identifying devices or systems able to provide prescribed performance. Notes that 18 papers from the Symposium are grouped in the area of automated optimal design. Describes the main challenges that condition computational electromagnetism’s future development. Concludes by itemizing the range of applications from small activators to optimization of induction heating systems in this third chapter.