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The purpose of this research is to develop an automatic optical inspection system for thin film transistor (TFT) liquid crystal display (LCD).

A new algorithm that accounts for the closing, opening, etching, dilating, and genetic method is used. It helps to calculate the location and rotation angle for transistor patterns precisely and quickly. The system can adjust inspection platform parameters according to viewed performance. The parameter adaptation occurs in parallel with running the genetic algorithm and imaging processing methods. The proposed method is compared with the algorithms that use artificial parameter sets.

This system ensures high quality in an LCD production line. This multipurpose image‐based measurement method uses unsophisticated and economical equipment, and it also detects defects in the micro‐fabrication process.

The experiment's results show that the proposed method offers advantages over other competing methods.

The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array.

The system set‐up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre‐processing with a precision of less than 0.09 micron.

By integrating with the genetic algorithm, the XY‐Table shortest moving path of the system is calculated to achieve the purpose of high‐speed inspection and automatic microlens array surface profile measurement.

The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.