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Low temperature co-fired ceramics (LTCC) technology-based micro-hotplates are of immense interest owing to their ruggedness, high temperature stability and reliability. The purpose of this paper is to study the role of thermal mass of LTCC-based micro-hotplates on the power consumption and temperature for gas-sensing applications.

The LTCC micro-hotplates with different thicknesses are designed and fabricated. The role of thermal mass on power consumption and temperature of these hotplates are simulated and experimentally studied. Also, a comparison study on the performance of LTCC and alumina-based hotplates of equivalent thickness is done. A thick film-sensing layer of tin oxide is coated on LTCC micro-hotplate and demonstrated for the sensing of commercial liquefied petroleum gas.

It is found from both simulation and experimental studies that the power consumption of LTCC hotplates was decreasing with the decrease in thermal mass to attain the same temperature. Also, the LTCC hotplates are less power-consuming than alumina-based one, owing to their superior thermal characteristics (low thermal conductivity, 3.3 W/ [m-K]).

This study will be beneficial for designing hotplates based on LTCC technology with low power consumption and better stability for gas-sensing applications.

The purpose of this paper is to explore a new possibility of providing high-temperature stable lead-free interconnections for low-temperature co-fired ceramics (LTCC) hotplate. For gas-sensing application, a temperature range of 200°C-400°C is usually required by the sensing film to detect different gases which imply the requirement of thermally stable interconnects. To observe the effect of parameters influencing power of the device, electro-thermal simulation of LTCC hotplate is also presented. Simulated LTCC hotplate is fabricated using the LTCC technology.

The proposed task is to fabricate LTCC hotplate with interconnects through vertical access. Dedicated via-holes generated on the LTCC hotplate are used to provide the interconnections. These interconnections are based on adherence and bonding mechanism between LTCC and thick film. COMSOL software is used for finite element method (FEM) simulation of the LTCC hotplate structure.

Thermal reliability of these interconnections is tested by continuous operation of hotplate at 350°C for 175 h and cycling durability test performed at 500°C. Additionally, vibration test is also carried out for the hotplate with no damage observed in the interconnections. An optimized firing profile to reproduce these interconnections along with the experimental flowchart is presented.

Research activity includes design and fabrication of LTCC hotplate with metal to thick-film based interconnections through vertical access. Research work on interconnections based on adherence of LTCC and thick film is limited.

A new way of providing lead-free and reliable interconnections will be useful for gas sensor fabricated on LTCC substrate. The FEM results are useful for optimizing the design for developing low-power LTCC hotplate.

Adherence and bonding mechanism between LTCC and thick film can be used to provide interconnections for LTCC devices. Methodology for providing such interconnections is discussed.