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Publication date: 1 March 1999

Kazuhiro Tsuruta, Yoshikazu Mikuriya and Yuichi Ishikawa

This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier…

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Abstract

This paper describes some aspects of micro sensors developed as part of the micromachine project in Japan. This national R&D project, industrial science and technology frontier program “Micromachine technology”, was inaugurated in 1991 as a ten‐year project. The R&D goal is to establish technologies to realize micromachines for the following practical applications; maintenance and repair of power plant facilities; miniaturization of manufacturing facilities; medical diagnosis and treatment. As a result, various types of micro sensors have been successfully developed.

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Sensor Review, vol. 19 no. 1
Type: Research Article
ISSN: 0260-2288

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