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Article
Publication date: 1 December 2004

Yoshifumi Okamoto, Toshio Imai, Daisuke Miyagi, Norio Takahashi, Kazuhiro Ozaki, Hiroshi Ono and Naoki Uchida

Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high…

Abstract

Induction heating is widely used in the industry due to high efficiency, precise control, rapid heating and low pollution properties. To process a semiconductor of high quality, uniform heating is necessary, but it is not easy to heat uniformly by using the conventional induction heating equipment. For this purpose, the zone control induction heating equipment is jointly developed with Mitsui Engineering Shipbuilding Co., Ltd. In this paper, the optimization of current in each coil is carried out using the finite element method and the optimization method in order to obtain a uniform eddy current loss distribution on graphite.

Details

COMPEL - The international journal for computation and mathematics in electrical and electronic engineering, vol. 23 no. 4
Type: Research Article
ISSN: 0332-1649

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