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1 – 1 of 1Cheng Lei, Haiyang Mao, Yudong Yang, Wen Ou, Chenyang Xue, Zong Yao, Anjie Ming, Weibing Wang, Ling Wang, Jiandong Hu and Jijun Xiong
Thermopile infrared (IR) detectors are one of the most important IR devices. Considering that the surface area of conventional four-end-beam (FEB)-based thermopile devices cannot…
Abstract
Purpose
Thermopile infrared (IR) detectors are one of the most important IR devices. Considering that the surface area of conventional four-end-beam (FEB)-based thermopile devices cannot be effectively used and the performance of this type of devices is relatively low, this paper aims to present a double-end-beam (DEB)-based thermopile device with high duty cycle and performance. The paper aims to discuss these issues.
Design/methodology/approach
Numerical analysis was conducted to show the advantages of the DEB-based thermopile devices.
Findings
Structural size of the DEB-based thermopiles may be further scaled down and maintain relatively higher responsivity and detectivity when compared with the FEB-based thermopiles. The authors characterized the thermoelectric properties of the device proposed in this paper, which achieves a responsivity of 1,151.14 V/W, a detectivity of 4.15 × 108 cm Hz1/2/W and a response time of 14.46 ms sensor based on DEB structure.
Orginality/value
The paper proposed a micro electro mechanical systems (MEMS) thermopile infrared sensor based on double-end-beam structure.
Details