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This paper aims to experimentally study the external flow characteristic of an isolated two-dimensional synthetic jet actuator undergoing diaphragm resonance.

The resonance frequency of the diaphragm (40 Hz) depends on the excitation mechanism in the actuator, whereas it is independent of cavity geometry, excitation waveform and excitation voltage. The velocity response of the synthetic jet is influenced by excitation voltage rather than excitation waveform. Thus, this investigation selected four different voltages (5, 10, 15 and 20 V) under the same sine waveform as experiment parameters.

The velocity field along the downstream direction is classified into five regions, which can be obtained by hot-wire measurement. The first region refers to an area in which flow moves from within the cavity to the exit of orifice through the oscillation of the diaphragm, but prior to the formation of the vortex of a synthetic jet. In this region, two characteristic frequencies exist at 20 and 40 Hz in the flow field. The second region refers to the area in which the vortices of a synthetic jet fully develop following their initial formation. In this region, the characteristic frequencies at 20 and 40 Hz still occur in the flow field. The third region refers to the area in which both fully developed vortices continue traveling downstream. It is difficult to obtain the characteristic frequency in this flow field, because the mean center velocities (ū) decay downstream and are proportional to (x/w)^−1/2 for the four excitation voltages. The fourth region reveals variations in both vortices as they merge into a single vortex. The mean center velocities (ū) are approximately proportional to (x/w)⁰ in this region for the four excitation voltages. A fifth region deals with variations in the vortex of a synthetic jet after both vortices merge into one, in which the mean center velocities (ū) are approximately proportional to (x/w)⁻¹ in this region for the four excitation voltages (x/w is the dimensionless streamwise distance).

Although the flow characteristics of synthetic jets had reported for flow control in some literatures, variations of flow structure for synthetic jets are still not studied under the excitation of diaphragm resonance. This paper showed some novel results that our velocity response results obtained by hot-wire measurement along the downstream direction compared with flow visualization resulted in the classification of five regions under the excitation of diaphragm resonance. In the future, it makes valuable contributions for experimental findings to provide researchers with further development of flow control.

MANY problems associated with aircraft investigations involve the accurate measurement of fluctuating fluid pressures. Various types of pickup exist from which choice may be made for this purpose. The suitability of a particular type for a specific application depends on the characteristics of the type and its associated electronic recorder. The fundamental requirements of fluctuating pressure pickups are discussed, and various types are described and typical examples of their application are given. Design data are derived based on experiments conducted on condenser type pickups, from which it is possible to design single diaphragm types for particular frequency and sensitivity requirements.

The purpose of this paper is to analyze and optimize synthetic jet actuators (SJAs) by means of a literature-known one-dimensional analytical model.

The model was fit to a wide range of experimental data from in-house built SJAs with different dimensions. A comprehensive parameter study was performed to identify coupling between parameters of the model and to find optimal dimensions of SJAs.

The coupling of two important parameters, the diaphragm resonance frequency and the cavity volume, can be described by a power law. Optimal orifice length and diameter can be calculated from cavity height in good agreement with literature. A transient oscillation correction is required to get correct simulation outcomes.

Based on these findings, SJA devices can be optimized for maximum jet velocity and, therefore, high performance.

The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane.

Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition.

The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material.

Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.

In this contribution, the design and integration of a piezoelectric vibrating device into low-temperature, co-fired ceramic (LTCC) structures are presented and discussed. The mechanical vibration of the diaphragm was stimulated with a piezoelectric actuator, which was integrated onto the diaphragm. Three different methods for the integration were designed, fabricated and evaluated.

The vibrating devices were designed as an edge-clamped diaphragm with an integrated piezoelectric actuator at its centre, whose role is to stimulate the vibration of the diaphragm via the converse piezoelectric effect. The design and feasibility study of the vibrating devices was supported by analytical methods and finite-element analyses.

The benchmarking of the ceramic vibrating devices showed that the thick-film piezoelectric actuator responds weakly in comparison with both the bulk actuators. On the other hand, the thick-film actuator has the lowest dissipation factor and it generates the largest displacement of the diaphragm with the lowest driving voltage. The resonance frequency of the vibrating device with the thick-film actuator is the most sensitive for an applied load (i.e. mass or pressure).

Research activity includes the design and the fabrication of a piezoelectric vibrating device in the LTCC structure. The research work on the piezoelectric properties of integrated piezoelectric actuators was limited.

Piezoelectric vibrating devices were used as pressure sensors.

Piezoelectric vibrating devices could be used not only for pressure sensors but also for other type of sensors and detectors and for microbalances.

In Aerospace applications, the inlet tubes are used to mount strain gauge type pressure sensors on the engine under static test to measure engine chamber pressure. This paper aims to focus on the limitations of the inlet tube and its design aspects to serve better in the static test environment. The different sizes of the inlet tubes are designed to meet the static test and safety requirements. This paper presents the performance evaluation of the designed inlet tubes with calibration results and the selection criteria of the inlet tube to measure combustion chamber pressure with the specified accuracy during static testing of engines.

Two sensors, specifically, one cavity type pressure sensor with the inlet tube of range 0-6.89 MPa having natural frequency of the diaphragm 17 KHz and another flush diaphragm type pressure sensor of the same range having −3 dB frequency response, 5 KHz are mounted on the same pressure port of the engine under static test to study the shortcomings of the inlet tube. The limitations of the inlet tube have been analyzed to aid the tube design. The different sizes of inlet tubes are designed, fabricated and tested to study the effect of the inlet tube on the performance of the pressure sensor. The dynamic calibration is used for this purpose. The dynamic parameters of the sensor with the designed tubes are calculated and analyzed to meet the static test requirements. The diaphragm temperature test is conducted on the representative hardware of pressure sensor with and without inlet tube to analyze the effect of the inlet tube against the temperature error. The inlet tube design is validated through the static test to gain confidence on measurement.

The cavity type pressure sensor failed to capture the pressure peak, whereas the flush diaphragm type pressure sensor captured the pressure peak of the engine under a static test. From the static test data and dynamic calibration results, the bandwidth of cavity type sensor with tube is much lower than the required bandwidth (five times the bandwidth of the measurand), and hence, the cavity type sensor did not capture the pressure peak data. The dynamic calibration results of the pressure sensor with and without an inlet tube show that the reduction of the bandwidth of the pressure sensor is mainly due to the inlet tube. From the analysis of dynamic calibration results of the sensor with the designed inlet tubes of different sizes, it is shown that the bandwidth of the pressure sensor decreases as the tube length increases. The bandwidth of the pressure sensor with tube increases as the tube inner diameter increases. The tube with a larger diameter leads to a mounting problem. The inlet tube of dimensions 6 × 4 × 50 mm is selected as it helps to overcome the mounting problem with the required bandwidth. From the static test data acquired using the pressure sensor with the selected inlet tube, it is shown that the selected tube aids the sensor to measure the pressure peak accurately. The designed inlet tube limits the diaphragm temperature within the compensated temperature of the sensor for 5.2 s from the firing of the engine.

Most studies of pressure sensor focus on the design of a sensor to measure static and slow varying pressure, but not on the transient pressure measurement and the design of the inlet tube. This paper presents the limitations of the inlet tube against the bandwidth requirement and recommends dynamic calibration of the sensor to evaluate the bandwidth of the sensor with the inlet tube. In this paper, the design aspects of the inlet tube and its effect on the bandwidth of the pressure sensor and the temperature error of the measured pressure values are presented with experimental results. The calibration results of the inlet tubes with different configurations are analyzed to select the best geometry of the tube and the selected tube is validated in the static test environment.

A single wafer silicon condenser microphone with a novel single deeply corrugated diaphragm is presented in this paper. The microphone diaphragm with corrugation depth of 100 μm is only 1 mm² in area, while the open‐circuit sensitivity as high as 9.8 mV/Pa under a bias voltage of 6 V has been obtained. The recorded frequency bandwidth is about 20 kHz. The measurements show reasonable agreements with the theoretical predictions.

Resonant sensing is a high performance technique suitable for a wide range of applications. Defines the principles of resonant sensing and describes the various fabrication techniques. Details resonant sensor performance and finally gives examples of resonant sensors in use today.

Pressure, being one of the key variables investigated in scientific and engineering research, requires critical and accurate measurement techniques. With the advancements in materials and machining technologies, there is a large leap in the measurement techniques including the development of micro electromechanical systems (MEMS) sensors. These sensors are one to two orders smaller in magnitude than traditional sensors and combine electrical and mechanical components that are fabricated using integrated circuit batch-processing technologies. MEMS are finding enormous applications in many industrial fields ranging from medical to automotive, communication to electronics, chemical to aviation and many more with a potential market of billions of dollars. MEMS pressure sensors are now widely used devices owing to their intrinsic properties of small size, light weight, low cost, ease of batch fabrication and integration with an electronic circuit. This paper aims to identify and analyze the common pressure sensing techniques and discuss their uses and advantages. As per our understanding, usage of MEMS pressure sensors in the aerospace industry is quite limited due to cost constraints and indirect measurement approaches owing to the inability to locate sensors in harsh environments. The purpose of this study is to summarize the published literature for application of MEMS pressure sensors in the said field. Five broad application areas have been investigated including: propulsion/turbomachinery applications, turbulent flow diagnosis, experimentalaerodynamics, micro-flow control and unmanned aerial vehicle (UAV)/micro aerial vehicle (MAV) applications.

The first part of the paper deals with an introduction to MEMS pressure sensors and mathematical relations for its fabrication. The second part covers pressure sensing principles followed by the application of MEMS pressure sensors in five major fields of aerospace industry.

In this paper, various pressure sensing principles in MEMS and applications of MEMS technology in the aerospace industry have been reviewed. Five application fields have been investigated including: Propulsion/Turbomachinery applications, turbulent flow diagnosis, experimental aerodynamics, micro-flow control and UAV/MAV applications. Applications of MEMS sensors in the aerospace industry are quite limited due to requirements of very high accuracy, high reliability and harsh environment survivability. However, the potential for growth of this technology is foreseen due to inherent features of MEMS sensors’ being light weight, low cost, ease of batch fabrication and capability of integration with electric circuits. All these advantages are very relevant to the aerospace industry. This work is an endeavor to present a comprehensive review of such MEMS pressure sensors, which are used in the aerospace industry and have been reported in recent literature.

As per the author’s understanding, usage of MEMS pressure sensors in the aerospace industry is quite limited due to cost constraints and indirect measurement approaches owing to the inability to locate sensors in harsh environments. Present work is a prime effort in summarizing the published literature for application of MEMS pressure sensors in the said field. Five broad application areas have been investigated including: propulsion/turbomachinery applications, turbulent flow diagnosis, experimental aerodynamics, micro-flow control and UAV/MAV applications.

The necessity for refinement of airscrew balance in order to eliminate destructive vibration from this source is due largely to the continuously improving standards of passenger comfort of modern aeroplanes and to the operator's desire to extend the normal service life of the power plant and its accessories as well as that of the aeroplane structure. Power plant vibration already has been reduced to a degree where, in standard aeroplanes, there is no longer danger of major structural failure due to vibration originating from this source. Efforts to refine further the balance of engines and airscrews are directed mainly at increasing passenger comfort and extending the service life of aeroplane equipment.