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Abstract

Purpose

This document presents the study of a one‐dimensional thermal inclinometer based on free convection.

Design/methodology/approach

A micromachined one is used. The sensitivity of the sensor is optimized in a close chamber containing CO2 gas under pressure.

Findings

By using this type of sensor in a close chamber containing CO2 gas under pressure, the sensitivity increase and the response time decrease when the pressure increase. High resolution will be achieved.

Research limitations/implications

High shock reliability.

Practical implications

Measuring μg acceleration.

Originality/value

Low cost production.