This document presents the study of a one‐dimensional thermal inclinometer based on free convection.
A micromachined one is used. The sensitivity of the sensor is optimized in a close chamber containing CO2 gas under pressure.
By using this type of sensor in a close chamber containing CO2 gas under pressure, the sensitivity increase and the response time decrease when the pressure increase. High resolution will be achieved.
High shock reliability.
Measuring μg acceleration.
Low cost production.