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The purpose of this paper is to review possibilities of implementing ceramic additive manufacturing (AM) into electronic device production, which can enable great new possibilities.

A short introduction into additive techniques is included, as well as primary characterization of structuring capabilities, dielectric performance and applicability in the electronic manufacturing process.

Ceramic stereolithography (SLA) is suitable for microchannel manufacturing, even using a relatively inexpensive system. This method is suitable for implementation into the electronic manufacturing process; however, a search for better materials is desired, especially for improved dielectric parameters, lowered sintering temperature and decreased porosity.

Relatively inexpensive ceramic SLA, which is now available, could make ceramic electronics, currently restricted to specific applications, more available.

Ceramic AM is in the beginning phase of implementation in electronic technology, and only a few reports are currently available, the most significant of which is mentioned in this paper.

The purpose of this study is to design, fabricate and investigate low-temperature co-fired ceramic (LTCC) structures with integrated microfluidic elements. Special attention is paid to the study of fluid properties of micro-channels and microvalves, which are important constitutive parts of both, microfluidic systems and individual microfluidic devices.

Several test patterns of fluid channels with different geometry and different types of valves were designed and realized in LTCC technology. All test structures were tested under the flow of two fluids (liquids): water and isopropyl alcohol. Flow rates at different applied pressure were measured and hydrodynamic resistance and diode effect were calculated.

The investigation of the channels showed that viscosity of fluidic media has significant influence on the hydrodynamic resistance in channels with rectangular cross-section, while this effect is small on channels with square cross-section. The viscosity also has a decisive influence on the diode effect of different shape of valves, and therefore, it is important in the selection of the valve in practical applications.

In this work, the investigation of hydrodynamic resistance of channels and diode effect of passive valves is limited on selected geometry and only on two fluidic media and two applied pressures. All these and some other parameters have a significant influence on fluidic properties, but this will be the topic of the next research work, which will be supported by numerical modelling.

The presented results are useful in the future designing process of LTCC-based microfluidic devices and systems.

Microfluidic in the LTCC structures is an unconventional use of this technology. Therefore, the fluid properties are relatively unsearched. On the other hand, the global use of microfluidic devices and systems is growing rapidly in various applications. They are mostly made by polymer materials, however, in more demanding applications; ceramic is a useful alternative.

The purpose of this paper is to present a study on miniaturized instruments for analytical chemistry with a microplasma as the excitation source.

The atmospheric pressure glow microdischarge could be ignited inside a ceramic structure between a solid anode and a liquid cathode. As a result of the cathode sputtering of the solution, it was possible to determine its chemical composition by analyzing the emission spectra of the discharge. Cathodes with microfluidic channels and two types of anodes were constructed. Both types were tested through experimentation. Impact of the electrodes geometry on the discharge was established. A cathode aperture of various sizes and anodes made from different materials were used.

The spectroscopic properties of the discharge and its usefulness in the analysis depended on the ceramic structure. The surface area of the cathode aperture and the flow rate of the solution influence on the detection limits (DLs) of Zn and Cd.

Constructed ceramic structures were able to excite elements and their laboratory-size systems. During the experiments, Zn and Cd were detected with DLs 0.024 and 0.053 mg/L, respectively.

A characteristic feature of LTCC is good workability. In some cases a LTCC‐based microsystem can be a good alternative to microsystems made in silicon or other technologies. Reasons for choosing LTCC‐Technology may be financial considerations or specific material properties. A main problem is to simplify a mechanical component in such a way, that it is possible to integrate this component in a planar structure with a small height in consideration of the restrictions of the LTCC‐Technology. In contrast to LTCC‐based substrates with only electrical circuits the integration of mechanical components make other demands on the different technological steps of the LTCC‐Process. In this paper some 3D‐structures made in LTCC‐like fluidic channels, membranes usable for micropumps or pressure sensors – and some aspects of required special technological demands are described.

In this contribution, the design and integration of a piezoelectric vibrating device into low-temperature, co-fired ceramic (LTCC) structures are presented and discussed. The mechanical vibration of the diaphragm was stimulated with a piezoelectric actuator, which was integrated onto the diaphragm. Three different methods for the integration were designed, fabricated and evaluated.

The vibrating devices were designed as an edge-clamped diaphragm with an integrated piezoelectric actuator at its centre, whose role is to stimulate the vibration of the diaphragm via the converse piezoelectric effect. The design and feasibility study of the vibrating devices was supported by analytical methods and finite-element analyses.

The benchmarking of the ceramic vibrating devices showed that the thick-film piezoelectric actuator responds weakly in comparison with both the bulk actuators. On the other hand, the thick-film actuator has the lowest dissipation factor and it generates the largest displacement of the diaphragm with the lowest driving voltage. The resonance frequency of the vibrating device with the thick-film actuator is the most sensitive for an applied load (i.e. mass or pressure).

Research activity includes the design and the fabrication of a piezoelectric vibrating device in the LTCC structure. The research work on the piezoelectric properties of integrated piezoelectric actuators was limited.

Piezoelectric vibrating devices were used as pressure sensors.

Piezoelectric vibrating devices could be used not only for pressure sensors but also for other type of sensors and detectors and for microbalances.

The purpose of this paper is to present the research activity and results to research and development society on the field of ceramic microsystems.

The chemical reactor was developed as a non-conventional application of low temperature co-fired ceramic (LTCC) and thick-film technologies. In the ceramic reactor with a large-volume, buried cavity, filled with a catalyst, the reaction between water and methanol produces hydrogen and carbon dioxide (together with traces of carbon monoxide). The LTCC ceramic three-dimensional (3D) structure consists of a reaction chamber, two inlet channels, an inlet mixing channel, an inlet distributor, an outlet collector and an outlet channel. The inlet and outlet fluidic barriers for the catalyst of the reaction chamber are made with two “grid lines”.

A 3D ceramic structure made by LTCC technology was successfully designed and developed for chemical reactor – methanol decomposition.

Research activity includes the design and the capability of materials and technology (LTCC) to fabricate chemical reactor with large cavity. But further dimensions-scale-up is limited.

The technology for the fabrication of LTCC-based chemical reactor was developed and implemented in system for methanol decomposition.

The approach (large-volume cavity in ceramic structure), which has been developed, can be used for other type of reactors also.

The purpose of this paper is to develop the device made of low temperature co-fired ceramics (LTCC) and lead zirconate titanate (PZT) by co-firing both materials. In the paper, the technology and properties of a miniature uniaxial ceramic accelerometer are presented.

Finite element method (FEM) is applied to predict properties of the sensor vs main dimensions of the sensor. The LTCC process is applied during manufacturing of the device. All the advantages of the technology are taken into account during designing three-dimensional structure of the sensor. The sensitivity and resonant frequency of the accelerometer are measured. Real material parameters of PZT are estimated according to measurement results and FEM simulations.

The ceramic sensor integrated with SMD package with outer dimensions of 5 × 5 × 5 mm3 is manufactured. The accelerometer exhibits sensitivity of 0.75 pC/g measured at 100 Hz. The resonant frequency is equal to about 2 kHz. Useful frequency range is limited by 3 dB sensitivity change at about 1 kHz.

Sensitivity of the device is limited by interaction between LTCC and PZT materials during co-firing process. The estimated d parameters are ten times worse comparing to bulk Pz27 material. Further research on materials compatibility should be carried out.

The sensor can be easily integrated into various devices made of standard electronic printed circuit boards (PCBs). Applied method of direct integration of piezoelectric transducers with LTCC material enables manufacturing of complex ceramic systems with built-in accelerometer in the substrate.

The accelerometer is a sensor and a package simultaneously. The miniature ceramic device is compatible with surface mounting technology; hence, it can be used directly on PCBs for vibration monitoring inside electronic devices and systems.

This paper aims to present a research on utilization of an irreversible bonding between non-transparent low temperature co-fired ceramics (LTCC) and transparent poly(dimethylsiloxane) (PDMS). The research presented in this paper is focused on the technology and performance of the miniature microfluidic module for fluorescence measurement.

The chemical combination of both materials is achieved through surface modification using argon-oxygen dielectric barrier discharge (DBD) plasma. According to the performed spectroscopic analyses (X-ray photoelectron spectroscopy, XPS; attenuated total reflection-Fourier infrared spectroscopy, ATR-FTIR) and contact angle measurements, the LTCC and PDMS surfaces are oxidized during the process. The presented microfluidic module was fabricated using LTCC technology. The possibility for the fabrication of LTCC-PDMS microfluidic fluorescent sensor is studied. The performance of the sensor was examined experimentally.

As a result of DBD plasma oxidation, the LTCC and PDMS surfaces change in character from hydrophobic to hydrophilic and were permanently bonded. The presented LTCC-PDMS bonding technique was used to fabricate a microfluidic fluorescent sensor. The preliminary measurements of the sensor have proven that it is possible to observe the fluorescence of a liquid sample from a very small volume.

The presented research is a preliminary work which is focused on the fabrication of the LTCC-PDMS fluorescent sensor. The microfluidic device was positively tested only for ethanolic fluorescein solutions. Therefore, fluorescence measurements should be performed for biological specimen (e.g. DNA).

The LTCC-PDMS bonding technology combines the advantages of both materials. One the one hand, transparent PDMS with precise, transparent three-dimensional structures can be fabricated using hot embossing, soft lithography or laser ablation. On the other hand, rigid LTCC substrate consisting of microfluidic structures, electric interconnections, heaters and optoelectronic components can be fabricated. The development of the LTCC-PDMS microfluidic modules provides opportunity for the construction of a lab-on-chip, or micro-total analysis systems-type system, for analytical chemistry and fast medical diagnoses.

This paper shows utilization of the PDMS-LTCC bonding technology for microfluidics. Moreover, the design, fabrication and performance of the PDMS-LTCC fluorescent sensor are presented.

The purpose of this study was to design, fabricate and test devices based on transformers integrated with low-temperature co-fired ceramic (LTCC) modules with isolation between primary and secondary windings at the level between 6 and 12 kV.

Insulating properties of the LTCC were examined. Dielectric strength and volume resistivity were determined for common LTCC tapes: 951 (DuPont), 41020, 41060 (ESL), A6M (Ferro) and SK47 (KEKO). According to the determined properties, three different devices were designed, fabricated and tested: a compact DC/DC converter, a galvanic separator for serial digital bus and a transformer for high-voltage generator.

Breakdown field intensity higher than 40 kV/mm was obtained for the test samples set, whereas the best breakdown field intensity of about 90 kV/mm was obtained for 951 tape. The materials 41020 and 951 exhibited the highest volume resistivity. Fabricated devices exhibited safe operation up to a potential difference of 10 kV, limited by minimum clearance. Long-term stability was assured by over 20 kV strength of inner dielectric.

This paper contains description of three devices made in the LTCC technology for application in systems with high-voltage isolation requirement, for example, for power or railway power networks.

The results show that LTCC is a suitable material for fabrication of high-voltage devices with integrated passives. Technology and properties of three examples of such devices are described, demonstrating the ability of the LTCC technology for application in reliable high-voltage devices and systems.

The purpose of this paper is to focus on the technology and performance of the miniature microfluidic module for urea determination. The presented module was made using low-temperature co-fired ceramics (LTCC). It shows the possibility for the integration of the bioreceptor layers with structures that have been fabricated using modern microelectronic technology.

The presented microfluidic module was fabricated using LTCC technology. The possibility for the fabrication of an enzymatic microreactor in a multilayer ceramic substrate, made of CeramTec glass ceramic (GC) material systems with an integrated thick-film heater, is studied. Different configurations of the LTCC/heater materials (gold, silvers and palladium-silver) are taken into account. The performance of the LTCC-based microfluidic module with the integrated heater and immobilized enzyme was examined experimentally.

A compatible material for the heater embedded in the CeramTec GC-based structures was found. The preliminary measurements made for the test solution containing various concentrations of urea have shown stability (for seven days of operation) and a relatively high signal-to-noise ratio (above 3 pH units) for the microreactor’s output signal.

The presented research is a preliminary work which is focused on the fabrication of the LTCC-based microfluidic module, with an integrated heater and immobilized enzyme for urea determination. The device was positively tested using a model reaction of the hydrolysis of urea. However, urea concentration in real (biological) fluid should also be measured.

The development of the LTCC-based microfluidic module for urea determination provides opportunity for the construction of a lab-on-chip, or μTAS-type system, for fast medical diagnoses and the continuous monitoring of various biochemical parameters, e.g. for estimating the effectiveness of hemodialysis.

This paper shows the design, fabrication and performance of the novel microfluidic module for urea determination, made with LTCC technology.