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The quality of GeOx–Ge interface and the equivalent oxide thickness (EOT) are the main issues in fabricating high-k/Ge gate stack due to the low-k of GeOx interfacial…
The quality of GeOx–Ge interface and the equivalent oxide thickness (EOT) are the main issues in fabricating high-k/Ge gate stack due to the low-k of GeOx interfacial layer (IL). Therefore, a precise study of the formation of GeOx IL and its contribution to EOT is of utmost importance. In this study, the GeOx ILs were formed through post-oxidation annealing of sputtered Al2O3 on the Ge substrate. The purpose of this paper is to report on growth kinetics and composition of IL between Al2O3 and Ge for HCl- and HF-last Ge surface.
After wet chemical cleaning with HCl or HF, Al2O3 was grown onto the Ge surface by RF sputtering. Thickness and composition of IL formed after post-anneal deposition at 400°C in dry oxygen ambience were evaluated as a function of deposition time by FESEM and characterized by X-ray photoelectron spectroscopy, respectively.
It was observed that the composition and thickness of IL were dependent on the starting surface and an aluminum germinate-like composition was formed during RF sputtering for both HF- and HCl-last starting surface.
The novelty of this work is to investigate the starting surface of Ge to IL growth between Al2O3/Ge that will lead to the improvement in Ge metal insulator field effect transistors (MISFETs) application.
Muhamad Ramdzan Buyong, Farhad Larki, Muhamad Ikhmal Hakimi Zainal, Abdelaziz Yousif Ahmed Almahi, Ahmad Ghadafi Ismail, Azrul Azlan Hamzah, Aminuddin Ahmad Kayani Kayani, Céline Elie Caille and Burhanuddin Yeop Majlis
This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator…
This paper aims to present the capacitance characterization of tapered dielectrophoresis (DEP) microelectrodes as micro-electro-mechanical system sensor and actuator device. The application of DEP-on-a-chip (DOC) can be used to evaluate and correlate the capacitive sensing measurement at an actual position and end station of liquid suspended targeted particles by DEP force actuator manipulation.
The capability of both, sensing and manipulation was analysed based on capacitance changes corresponding to the particle positioning and stationing of the targeted particles at regions of interest. The mechanisms of DEP sensor and actuator, designed in DOC applications were energized by electric field of tapered DEP microelectrodes. The actual DEP forces behaviour has been also studied via quantitative analysis of capacitance measurement value and its correlation with qualitative analysis of positioning and stationing of targeted particles.
The significance of the present work is the ability of using tapered DEP microelectrodes in a closed mode system to simultaneously sense and vary the magnitude of manipulation.
The integration of DOC platform for contactless electrical-driven with selective detection and rapid manipulation can provide better efficiency in in situ selective biosensors or bio-detection and rapid bio-manipulation for DOC diagnostic and prognostic devices.
This paper aims to present the dielectrophoresis (DEP) force (FDEP), defined as microelectrofluidics mechanism capabilities in performing selective detection and rapid…
This paper aims to present the dielectrophoresis (DEP) force (FDEP), defined as microelectrofluidics mechanism capabilities in performing selective detection and rapid manipulation of blood components such as red blood cells (RBC) and platelets. The purpose of this investigation is to understand FDEP correlation to the variation of dynamic dielectric properties of cells under an applied voltage bias.
In this paper, tapered design DEP microelectrodes are used and explained. To perform the characterization and optimization by analysing the DEP polarization factor, the change in dynamic dielectric properties of blood components are observed according to the crossover frequency (fxo) and adjustment frequency (fadj) variation for selective detection and rapid manipulation.
Experimental observation of dynamic dielectric properties change shows clear correlation to DEP polarization factor when performing selective detection and rapid manipulation. These tapered DEP microelectrodes demonstrate an in situ DEP patterning efficiency more than 95%.
The capabilities of tapered DEP microelectrode devices are introduced in this paper. However, they are not yet mature in medical research studies for various purposes such as identifying cells and bio-molecules for detection, isolation and manipulation application. This is because of biological property variations that require further DEP characterization and optimization.
The introduction of microelectrofluidics using DEP microelectrodes operate by selective detecting and rapid manipulating via lateral and vertical forces. This can be implemented on precision health-care development for lab-on-a-chip application in microfluidic diagnostic and prognostic devices.
This study introduces a new concept to understand the dynamic dielectric properties change. This is useful for rapid, label free and precise methods to conduct selective detection and rapid manipulation of mixtures of RBC and platelets. Further, potential applications that can be considered are for protein, toxin, cancer cell and bacteria detections and manipulation. Implementation of tapered DEP microelectrodes can be used based on the understanding of dynamic dielectric properties of polarization factor analysis.