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Hardness testing using a SEM offers visual observation and measurement according to the hardness definition even for submicroscopic impressions. It can provide information on plasticity, homogeneity, adhesion etc. which cannot be obtained from depth measurements alone. The device described operates inside a SEM and offers a load between 10−2N and 10−5N. The influence of test load, rate of load increase and dwell time on the results was examined on various materials.