EES-y

Citation

(2002), "EES-y", Work Study, Vol. 51 No. 7. https://doi.org/10.1108/ws.2002.07951gab.013

EES-y

EES-y

Brooks-PRI Automation, which delivers "total automation" for semiconductor manufacturing, has released its APCbuilder V2.0 software and introduced its new EEScube customised hardware package. Together, these enable companies to implement and reap the benefits of equipment engineering solutions (EES), including data visualisation, fault detection and classification, run-to-run control, and equipment performance tracking faster than ever before. EES software enables companies to monitor tool performance and automatically adjust settings to maximize yield and throughput. APCbuilder provides the critical link between Brooks-PRI's equipment integration software and its EES software modules, thus eliminating the need for custom integration. Utilising APCbuilder in conjunction with the EEScube hardware package, users of other equipment integration software packages can now draw data from process tools and feed it to the appropriate EES modules. The result: a simple, pre-packaged way to access process tool data’in order to quickly implement EES. For’more details, visit www.brooks-pri.com/