TY - JOUR AB - VL - 27 IS - 3 SN - 0260-2288 DO - 10.1108/sr.2007.08727caf.001 UR - https://doi.org/10.1108/sr.2007.08727caf.001 PY - 2007 Y1 - 2007/01/01 TI - American company develops unique glass MEMS technology T2 - Sensor Review PB - Emerald Group Publishing Limited Y2 - 2024/04/25 ER -