TY  - JOUR
AB  - 
VL  - 24
IS  - 4
SN  - 0260-2288
DO  - 10.1108/sr.2004.24.4.395.2
UR  - https://doi.org/10.1108/sr.2004.24.4.395.2
AU  - Rigelsford Jon
PY  - 2004
Y1  - 2004/01/01
TI  - MEMS Mechanical Sensors
T2  - Sensor Review
PB  - Emerald Group Publishing Limited
SP  - 395
EP  - 395
Y2  - 2024/04/23
ER  -