TY - JOUR AB - VL - 24 IS - 3 SN - 0260-2288 DO - 10.1108/sr.2004.08724cad.010 UR - https://doi.org/10.1108/sr.2004.08724cad.010 PY - 2004 Y1 - 2004/01/01 TI - Nanostructured Micromachined Devices T2 - Sensor Review PB - Emerald Group Publishing Limited Y2 - 2024/03/28 ER -