TY  - JOUR
AB  - 
VL  - 24
IS  - 3
SN  - 0260-2288
DO  - 10.1108/sr.2004.08724cad.008
UR  - https://doi.org/10.1108/sr.2004.08724cad.008
PY  - 2004
Y1  - 2004/01/01
TI  - Multi-functional MEMs Devices
T2  - Sensor Review
PB  - Emerald Group Publishing Limited
Y2  - 2024/04/23
ER  -