High-speed, high-accuracy moisture analyzer protects ultrahigh-purity 9UHP0 gas systems

Citation

(2002), "High-speed, high-accuracy moisture analyzer protects ultrahigh-purity 9UHP0 gas systems", Sensor Review, Vol. 22 No. 1. https://doi.org/10.1108/sr.2002.08722aad.008

High-speed, high-accuracy moisture analyzer protects ultrahigh-purity 9UHP0 gas systems

High-speed, high-accuracy moisture analyzer protects ultrahigh-purity 9UHP0 gas systems

Keyword: Moisture

AMETEK Model 5910 UHP moisture analyzer achieves part-per trillion detection

A new moisture analyzer from AMETEK Process Instruments detects changes in moisture concentration of less than 200 parts per trillion by volume (pptv). This capability makes it a suitable choice for the semiconductor fabrication and other industries that require 1 ppb (part per billion) moisture impurity detection for their process gas systems.

The Model 5910 establishes new standards for baseline stability and sensitivity with its ability to detect sub-part-per-billion changes in moisture concentration, while providing one of the fastest response speeds available (Plate 8). The UHP (Ultrahigh-Purity) and analyzer uses a new sensor design to detect moisture contamination in minutes rather than hours, at far lower cost than alternative technologies. That combination of accuracy and timeliness sets the Model 5910 analyzer apart with its ability to identify contaminants before they cause defective wafers and minimize costly interruptions in production from false contamination alarms.

Plate 8 Quartz Crystal Microbalance (QCM) sensor assures accuracy by constant cycling between process and reference gases

The analyzer verifies that specified gas purity levels are maintained at on-site separation, bulk delivery and distribution system transfer points and at points of use. It is well suited for real-world processing of 300 mm wafers. Previously, comparable performance was available only in laboratory- grade instruments under very controlled conditions. The analyzer's advanced quartz- crystal microbalance (QCM) sensor registers changes in moisture concentration of less than 200 parts per trillion by volume (pptv). Its non-equilibrium operation ensures response speeds significantly faster than other technologies such as aluminum-oxide, electrolytic and laser-based analyzers.

AMETEK was able to extend the reach of its QCM sensor technology to the pptv level through the refinement of the design and the addition of a zero-gas module. All surfaces of the Model 5910 analyzer are electropolished and the gas connections are welded.

The Model 5910 is completely compatible with virtually all non-corrosive gases including inerts (He, Ar, Ne, Xe, Kr), O2, H2 and N2. Its QCm sensor is unaffected by background gas. The Model 5910 analyzer is easier to use. Changing gases, for example, require sonly a quick and simple selection from a software menu.

The analyzer's unique combination of rapid startup, fast operating speed, and quick change from one gas to another makes it ideal for temporary monitoring applications such as verifying installation, maintenance, or repair of gas distribution systems. Its low sample flow requirement and multi-gas compatibility allow efficient assessment of the purity of cylinder gases.

The Model 5910 is one of a family of moisture analyzers from AMETEK, Inc., Paoli, Pennsylvania, USA, which is a leading global manufacturer of electronic instruments and electric motors with annual sales of more than US$1 billion.

For further information, please contact: Jurgen Gassen, AMETEK Precision Instruments Europe, Rudolf-Diesel Strasse 16, D-40670 Meerbusch Germany. Tel: 011 (49) 2159-91360; Fax: 011 (49) 2159-913639; E-mail: jurgen.gassen@ametek.com; Web site: www.emetekpi.com